JPS5339234B2 - - Google Patents

Info

Publication number
JPS5339234B2
JPS5339234B2 JP3554774A JP3554774A JPS5339234B2 JP S5339234 B2 JPS5339234 B2 JP S5339234B2 JP 3554774 A JP3554774 A JP 3554774A JP 3554774 A JP3554774 A JP 3554774A JP S5339234 B2 JPS5339234 B2 JP S5339234B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3554774A
Other languages
Japanese (ja)
Other versions
JPS50130363A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3554774A priority Critical patent/JPS5339234B2/ja
Publication of JPS50130363A publication Critical patent/JPS50130363A/ja
Publication of JPS5339234B2 publication Critical patent/JPS5339234B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP3554774A 1974-04-01 1974-04-01 Expired JPS5339234B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3554774A JPS5339234B2 (ko) 1974-04-01 1974-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3554774A JPS5339234B2 (ko) 1974-04-01 1974-04-01

Publications (2)

Publication Number Publication Date
JPS50130363A JPS50130363A (ko) 1975-10-15
JPS5339234B2 true JPS5339234B2 (ko) 1978-10-20

Family

ID=12444741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3554774A Expired JPS5339234B2 (ko) 1974-04-01 1974-04-01

Country Status (1)

Country Link
JP (1) JPS5339234B2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149194A (en) * 1977-05-31 1978-12-26 Sharp Corp Coating method for graphite substrate with silicon carbide
JP2567455B2 (ja) * 1988-05-10 1996-12-25 住友電気工業株式会社 被覆炭素材料
JPH0397691A (ja) * 1989-09-08 1991-04-23 Fujitsu Ltd 半導体装置製造用治具
JP2622609B2 (ja) * 1989-09-27 1997-06-18 東芝セラミックス株式会社 半導体製造用ｓｉｃ質セラミックス製品
JP5787558B2 (ja) * 2011-03-08 2015-09-30 イビデン株式会社 セラミックス基材支持具及びセラミックス部材の製造方法

Also Published As

Publication number Publication date
JPS50130363A (ko) 1975-10-15

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