JPS5339076A - Reticle mounting frame - Google Patents

Reticle mounting frame

Info

Publication number
JPS5339076A
JPS5339076A JP11314976A JP11314976A JPS5339076A JP S5339076 A JPS5339076 A JP S5339076A JP 11314976 A JP11314976 A JP 11314976A JP 11314976 A JP11314976 A JP 11314976A JP S5339076 A JPS5339076 A JP S5339076A
Authority
JP
Japan
Prior art keywords
reticle
frame
mounting frame
reticle mounting
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11314976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5346693B2 (Direct
Inventor
Kazuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11314976A priority Critical patent/JPS5339076A/ja
Publication of JPS5339076A publication Critical patent/JPS5339076A/ja
Publication of JPS5346693B2 publication Critical patent/JPS5346693B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP11314976A 1976-09-22 1976-09-22 Reticle mounting frame Granted JPS5339076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11314976A JPS5339076A (en) 1976-09-22 1976-09-22 Reticle mounting frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11314976A JPS5339076A (en) 1976-09-22 1976-09-22 Reticle mounting frame

Publications (2)

Publication Number Publication Date
JPS5339076A true JPS5339076A (en) 1978-04-10
JPS5346693B2 JPS5346693B2 (Direct) 1978-12-15

Family

ID=14604799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11314976A Granted JPS5339076A (en) 1976-09-22 1976-09-22 Reticle mounting frame

Country Status (1)

Country Link
JP (1) JPS5339076A (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171216A (ja) * 1982-03-30 1983-10-07 Amada Co Ltd 帯鋸盤における切削背分力検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171216A (ja) * 1982-03-30 1983-10-07 Amada Co Ltd 帯鋸盤における切削背分力検出装置

Also Published As

Publication number Publication date
JPS5346693B2 (Direct) 1978-12-15

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