JPS5338193B2 - - Google Patents
Info
- Publication number
- JPS5338193B2 JPS5338193B2 JP12849676A JP12849676A JPS5338193B2 JP S5338193 B2 JPS5338193 B2 JP S5338193B2 JP 12849676 A JP12849676 A JP 12849676A JP 12849676 A JP12849676 A JP 12849676A JP S5338193 B2 JPS5338193 B2 JP S5338193B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849676A JPS5352593A (en) | 1976-10-26 | 1976-10-26 | Electron rays-sensitive polymer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849676A JPS5352593A (en) | 1976-10-26 | 1976-10-26 | Electron rays-sensitive polymer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5352593A JPS5352593A (en) | 1978-05-13 |
| JPS5338193B2 true JPS5338193B2 (en) | 1978-10-13 |
Family
ID=14986171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12849676A Granted JPS5352593A (en) | 1976-10-26 | 1976-10-26 | Electron rays-sensitive polymer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5352593A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007976A1 (en) * | 1978-05-22 | 1980-02-20 | Western Electric Company, Incorporated | Lithographic resist and device processing utilizing same |
| JPS5795103U (en) * | 1980-12-02 | 1982-06-11 | ||
| JPH0345683Y2 (en) * | 1986-11-17 | 1991-09-26 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5983157A (en) * | 1982-09-28 | 1984-05-14 | エクソン・リサ−チ・アンド・エンジニアリング・カンパニ− | Method of increasing sensitivity and contrast of positive type polymer resist |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915372A (en) * | 1972-03-24 | 1974-02-09 | ||
| JPS511971A (en) * | 1974-06-25 | 1976-01-09 | Meidensha Electric Mfg Co Ltd | Kaiheikino sosasochi |
| US3984582A (en) * | 1975-06-30 | 1976-10-05 | Ibm | Method for preparing positive resist image |
-
1976
- 1976-10-26 JP JP12849676A patent/JPS5352593A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915372A (en) * | 1972-03-24 | 1974-02-09 | ||
| JPS511971A (en) * | 1974-06-25 | 1976-01-09 | Meidensha Electric Mfg Co Ltd | Kaiheikino sosasochi |
| US3984582A (en) * | 1975-06-30 | 1976-10-05 | Ibm | Method for preparing positive resist image |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007976A1 (en) * | 1978-05-22 | 1980-02-20 | Western Electric Company, Incorporated | Lithographic resist and device processing utilizing same |
| JPS5795103U (en) * | 1980-12-02 | 1982-06-11 | ||
| JPH0345683Y2 (en) * | 1986-11-17 | 1991-09-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5352593A (en) | 1978-05-13 |