JPS5337712B2 - - Google Patents
Info
- Publication number
- JPS5337712B2 JPS5337712B2 JP12192976A JP12192976A JPS5337712B2 JP S5337712 B2 JPS5337712 B2 JP S5337712B2 JP 12192976 A JP12192976 A JP 12192976A JP 12192976 A JP12192976 A JP 12192976A JP S5337712 B2 JPS5337712 B2 JP S5337712B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12192976A JPS5347775A (en) | 1976-10-13 | 1976-10-13 | Alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12192976A JPS5347775A (en) | 1976-10-13 | 1976-10-13 | Alignment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5347775A JPS5347775A (en) | 1978-04-28 |
| JPS5337712B2 true JPS5337712B2 (OSRAM) | 1978-10-11 |
Family
ID=14823409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12192976A Granted JPS5347775A (en) | 1976-10-13 | 1976-10-13 | Alignment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5347775A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59173400A (ja) * | 1983-03-17 | 1984-10-01 | 本州製紙株式会社 | 金属性物質の包装用材料の製造方法 |
| JPS59144918A (ja) * | 1982-12-08 | 1984-08-20 | テキサス・インスツルメンツ・インコ−ポレイテツド | 所定パタ−ンの位置決め方法及び装置 |
| JP3060435B2 (ja) * | 1994-07-28 | 2000-07-10 | 恵和株式会社 | 銅系金属腐食防止剤及びそれを用いた銅系金属用防錆紙 |
-
1976
- 1976-10-13 JP JP12192976A patent/JPS5347775A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5347775A (en) | 1978-04-28 |