JPS5337706B2 - - Google Patents
Info
- Publication number
- JPS5337706B2 JPS5337706B2 JP10441776A JP10441776A JPS5337706B2 JP S5337706 B2 JPS5337706 B2 JP S5337706B2 JP 10441776 A JP10441776 A JP 10441776A JP 10441776 A JP10441776 A JP 10441776A JP S5337706 B2 JPS5337706 B2 JP S5337706B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10441776A JPS5329674A (en) | 1976-08-31 | 1976-08-31 | Photoresist applicator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10441776A JPS5329674A (en) | 1976-08-31 | 1976-08-31 | Photoresist applicator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5329674A JPS5329674A (en) | 1978-03-20 |
| JPS5337706B2 true JPS5337706B2 (en:Method) | 1978-10-11 |
Family
ID=14380106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10441776A Granted JPS5329674A (en) | 1976-08-31 | 1976-08-31 | Photoresist applicator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329674A (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4439243A (en) * | 1982-08-03 | 1984-03-27 | Texas Instruments Incorporated | Apparatus and method of material removal with fluid flow within a slot |
| US4685975A (en) * | 1982-08-03 | 1987-08-11 | Texas Instruments Incorporated | Method for edge cleaning |
| US4439244A (en) * | 1982-08-03 | 1984-03-27 | Texas Instruments Incorporated | Apparatus and method of material removal having a fluid filled slot |
| JP2504549B2 (ja) * | 1988-12-15 | 1996-06-05 | パイオニア株式会社 | 流体供給処理装置 |
| JP3415670B2 (ja) * | 1994-03-03 | 2003-06-09 | 三菱電機株式会社 | ウエハ洗浄装置 |
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1976
- 1976-08-31 JP JP10441776A patent/JPS5329674A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5329674A (en) | 1978-03-20 |