JPS5337706B2 - - Google Patents

Info

Publication number
JPS5337706B2
JPS5337706B2 JP10441776A JP10441776A JPS5337706B2 JP S5337706 B2 JPS5337706 B2 JP S5337706B2 JP 10441776 A JP10441776 A JP 10441776A JP 10441776 A JP10441776 A JP 10441776A JP S5337706 B2 JPS5337706 B2 JP S5337706B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10441776A
Other languages
Japanese (ja)
Other versions
JPS5329674A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10441776A priority Critical patent/JPS5329674A/ja
Publication of JPS5329674A publication Critical patent/JPS5329674A/ja
Publication of JPS5337706B2 publication Critical patent/JPS5337706B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10441776A 1976-08-31 1976-08-31 Photoresist applicator Granted JPS5329674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10441776A JPS5329674A (en) 1976-08-31 1976-08-31 Photoresist applicator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10441776A JPS5329674A (en) 1976-08-31 1976-08-31 Photoresist applicator

Publications (2)

Publication Number Publication Date
JPS5329674A JPS5329674A (en) 1978-03-20
JPS5337706B2 true JPS5337706B2 (enrdf_load_stackoverflow) 1978-10-11

Family

ID=14380106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10441776A Granted JPS5329674A (en) 1976-08-31 1976-08-31 Photoresist applicator

Country Status (1)

Country Link
JP (1) JPS5329674A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685975A (en) * 1982-08-03 1987-08-11 Texas Instruments Incorporated Method for edge cleaning
US4439243A (en) * 1982-08-03 1984-03-27 Texas Instruments Incorporated Apparatus and method of material removal with fluid flow within a slot
US4439244A (en) * 1982-08-03 1984-03-27 Texas Instruments Incorporated Apparatus and method of material removal having a fluid filled slot
JP2504549B2 (ja) * 1988-12-15 1996-06-05 パイオニア株式会社 流体供給処理装置
JP3415670B2 (ja) * 1994-03-03 2003-06-09 三菱電機株式会社 ウエハ洗浄装置

Also Published As

Publication number Publication date
JPS5329674A (en) 1978-03-20

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