JPS5337705B2 - - Google Patents
Info
- Publication number
- JPS5337705B2 JPS5337705B2 JP9324676A JP9324676A JPS5337705B2 JP S5337705 B2 JPS5337705 B2 JP S5337705B2 JP 9324676 A JP9324676 A JP 9324676A JP 9324676 A JP9324676 A JP 9324676A JP S5337705 B2 JPS5337705 B2 JP S5337705B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9324676A JPS5318965A (en) | 1976-08-06 | 1976-08-06 | Resist coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9324676A JPS5318965A (en) | 1976-08-06 | 1976-08-06 | Resist coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5318965A JPS5318965A (en) | 1978-02-21 |
| JPS5337705B2 true JPS5337705B2 (en) | 1978-10-11 |
Family
ID=14077141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9324676A Granted JPS5318965A (en) | 1976-08-06 | 1976-08-06 | Resist coating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318965A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2616748B2 (en) * | 1995-07-17 | 1997-06-04 | 株式会社日立製作所 | Method for manufacturing semiconductor device |
| US6498433B1 (en) | 1999-12-30 | 2002-12-24 | General Electric Company | High temperature glaze for metal halide arctubes |
-
1976
- 1976-08-06 JP JP9324676A patent/JPS5318965A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5318965A (en) | 1978-02-21 |