JPS5337582Y2 - - Google Patents

Info

Publication number
JPS5337582Y2
JPS5337582Y2 JP472073U JP472073U JPS5337582Y2 JP S5337582 Y2 JPS5337582 Y2 JP S5337582Y2 JP 472073 U JP472073 U JP 472073U JP 472073 U JP472073 U JP 472073U JP S5337582 Y2 JPS5337582 Y2 JP S5337582Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP472073U
Other languages
Japanese (ja)
Other versions
JPS49112159U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP472073U priority Critical patent/JPS5337582Y2/ja
Publication of JPS49112159U publication Critical patent/JPS49112159U/ja
Application granted granted Critical
Publication of JPS5337582Y2 publication Critical patent/JPS5337582Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP472073U 1972-12-29 1972-12-29 Expired JPS5337582Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP472073U JPS5337582Y2 (en:Method) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP472073U JPS5337582Y2 (en:Method) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS49112159U JPS49112159U (en:Method) 1974-09-25
JPS5337582Y2 true JPS5337582Y2 (en:Method) 1978-09-12

Family

ID=28066719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP472073U Expired JPS5337582Y2 (en:Method) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5337582Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444216Y2 (en:Method) * 1985-10-07 1992-10-19
JPS6369564A (ja) * 1986-09-10 1988-03-29 Dainippon Screen Mfg Co Ltd 基板の回転塗布装置

Also Published As

Publication number Publication date
JPS49112159U (en:Method) 1974-09-25

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