JPS5337582U - - Google Patents
Info
- Publication number
- JPS5337582U JPS5337582U JP11888476U JP11888476U JPS5337582U JP S5337582 U JPS5337582 U JP S5337582U JP 11888476 U JP11888476 U JP 11888476U JP 11888476 U JP11888476 U JP 11888476U JP S5337582 U JPS5337582 U JP S5337582U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11888476U JPS5337582U (cs) | 1976-09-06 | 1976-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11888476U JPS5337582U (cs) | 1976-09-06 | 1976-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5337582U true JPS5337582U (cs) | 1978-04-01 |
Family
ID=28728424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11888476U Pending JPS5337582U (cs) | 1976-09-06 | 1976-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5337582U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5771666A (en) * | 1980-10-20 | 1982-05-04 | Seiko Epson Corp | Apparatus for coating resist |
| JPS63187630A (ja) * | 1987-01-30 | 1988-08-03 | Toshiba Corp | 半導体ウエ−ハの液処理装置 |
-
1976
- 1976-09-06 JP JP11888476U patent/JPS5337582U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5771666A (en) * | 1980-10-20 | 1982-05-04 | Seiko Epson Corp | Apparatus for coating resist |
| JPS63187630A (ja) * | 1987-01-30 | 1988-08-03 | Toshiba Corp | 半導体ウエ−ハの液処理装置 |