JPS5337456U - - Google Patents

Info

Publication number
JPS5337456U
JPS5337456U JP11950376U JP11950376U JPS5337456U JP S5337456 U JPS5337456 U JP S5337456U JP 11950376 U JP11950376 U JP 11950376U JP 11950376 U JP11950376 U JP 11950376U JP S5337456 U JPS5337456 U JP S5337456U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11950376U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11950376U priority Critical patent/JPS5337456U/ja
Publication of JPS5337456U publication Critical patent/JPS5337456U/ja
Pending legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP11950376U 1976-09-07 1976-09-07 Pending JPS5337456U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11950376U JPS5337456U (fr) 1976-09-07 1976-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11950376U JPS5337456U (fr) 1976-09-07 1976-09-07

Publications (1)

Publication Number Publication Date
JPS5337456U true JPS5337456U (fr) 1978-04-01

Family

ID=28729022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11950376U Pending JPS5337456U (fr) 1976-09-07 1976-09-07

Country Status (1)

Country Link
JP (1) JPS5337456U (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227437A (ja) * 1983-09-28 1985-11-12 Yokogawa Hewlett Packard Ltd 集積回路用インターフェース装置
JPS63129011U (fr) * 1987-02-17 1988-08-24
JPH0629369A (ja) * 1985-10-24 1994-02-04 Texas Instr Inc <Ti> ウェーハ処理ステーション

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227437A (ja) * 1983-09-28 1985-11-12 Yokogawa Hewlett Packard Ltd 集積回路用インターフェース装置
JPH0629369A (ja) * 1985-10-24 1994-02-04 Texas Instr Inc <Ti> ウェーハ処理ステーション
JPH0645425A (ja) * 1985-10-24 1994-02-18 Texas Instr Inc <Ti> ウェーハ移送方法及びウェーハ処理モジュール
JPS63129011U (fr) * 1987-02-17 1988-08-24

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