JPS5337456U - - Google Patents
Info
- Publication number
- JPS5337456U JPS5337456U JP11950376U JP11950376U JPS5337456U JP S5337456 U JPS5337456 U JP S5337456U JP 11950376 U JP11950376 U JP 11950376U JP 11950376 U JP11950376 U JP 11950376U JP S5337456 U JPS5337456 U JP S5337456U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11950376U JPS5337456U (de) | 1976-09-07 | 1976-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11950376U JPS5337456U (de) | 1976-09-07 | 1976-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5337456U true JPS5337456U (de) | 1978-04-01 |
Family
ID=28729022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11950376U Pending JPS5337456U (de) | 1976-09-07 | 1976-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5337456U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227437A (ja) * | 1983-09-28 | 1985-11-12 | Yokogawa Hewlett Packard Ltd | 集積回路用インターフェース装置 |
| JPS63129011U (de) * | 1987-02-17 | 1988-08-24 | ||
| JPH0629369A (ja) * | 1985-10-24 | 1994-02-04 | Texas Instr Inc <Ti> | ウェーハ処理ステーション |
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1976
- 1976-09-07 JP JP11950376U patent/JPS5337456U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227437A (ja) * | 1983-09-28 | 1985-11-12 | Yokogawa Hewlett Packard Ltd | 集積回路用インターフェース装置 |
| JPH0629369A (ja) * | 1985-10-24 | 1994-02-04 | Texas Instr Inc <Ti> | ウェーハ処理ステーション |
| JPH0645425A (ja) * | 1985-10-24 | 1994-02-18 | Texas Instr Inc <Ti> | ウェーハ移送方法及びウェーハ処理モジュール |
| JPS63129011U (de) * | 1987-02-17 | 1988-08-24 |