JPS5337375A - Secondary electron detector in scanning type electron microscope - Google Patents

Secondary electron detector in scanning type electron microscope

Info

Publication number
JPS5337375A
JPS5337375A JP10673977A JP10673977A JPS5337375A JP S5337375 A JPS5337375 A JP S5337375A JP 10673977 A JP10673977 A JP 10673977A JP 10673977 A JP10673977 A JP 10673977A JP S5337375 A JPS5337375 A JP S5337375A
Authority
JP
Japan
Prior art keywords
scanning type
electron microscope
detector
secondary electron
type electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10673977A
Other languages
Japanese (ja)
Inventor
Kimio Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10673977A priority Critical patent/JPS5337375A/en
Publication of JPS5337375A publication Critical patent/JPS5337375A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the introduction of the light emission of scintillator to the cathode of photo electric multiplier without loss, by using the light guide pipe having efficient function.
COPYRIGHT: (C)1978,JPO&Japio
JP10673977A 1977-09-07 1977-09-07 Secondary electron detector in scanning type electron microscope Pending JPS5337375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10673977A JPS5337375A (en) 1977-09-07 1977-09-07 Secondary electron detector in scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10673977A JPS5337375A (en) 1977-09-07 1977-09-07 Secondary electron detector in scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS5337375A true JPS5337375A (en) 1978-04-06

Family

ID=14441282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10673977A Pending JPS5337375A (en) 1977-09-07 1977-09-07 Secondary electron detector in scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS5337375A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611432A (en) * 1979-07-09 1981-02-04 Matsushita Electric Ind Co Ltd Light delay device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611432A (en) * 1979-07-09 1981-02-04 Matsushita Electric Ind Co Ltd Light delay device

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