JPS5337375A - Secondary electron detector in scanning type electron microscope - Google Patents
Secondary electron detector in scanning type electron microscopeInfo
- Publication number
- JPS5337375A JPS5337375A JP10673977A JP10673977A JPS5337375A JP S5337375 A JPS5337375 A JP S5337375A JP 10673977 A JP10673977 A JP 10673977A JP 10673977 A JP10673977 A JP 10673977A JP S5337375 A JPS5337375 A JP S5337375A
- Authority
- JP
- Japan
- Prior art keywords
- scanning type
- electron microscope
- detector
- secondary electron
- type electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable the introduction of the light emission of scintillator to the cathode of photo electric multiplier without loss, by using the light guide pipe having efficient function.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10673977A JPS5337375A (en) | 1977-09-07 | 1977-09-07 | Secondary electron detector in scanning type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10673977A JPS5337375A (en) | 1977-09-07 | 1977-09-07 | Secondary electron detector in scanning type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5337375A true JPS5337375A (en) | 1978-04-06 |
Family
ID=14441282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10673977A Pending JPS5337375A (en) | 1977-09-07 | 1977-09-07 | Secondary electron detector in scanning type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5337375A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5611432A (en) * | 1979-07-09 | 1981-02-04 | Matsushita Electric Ind Co Ltd | Light delay device |
-
1977
- 1977-09-07 JP JP10673977A patent/JPS5337375A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5611432A (en) * | 1979-07-09 | 1981-02-04 | Matsushita Electric Ind Co Ltd | Light delay device |
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