JPS5336757B2 - - Google Patents

Info

Publication number
JPS5336757B2
JPS5336757B2 JP5166772A JP5166772A JPS5336757B2 JP S5336757 B2 JPS5336757 B2 JP S5336757B2 JP 5166772 A JP5166772 A JP 5166772A JP 5166772 A JP5166772 A JP 5166772A JP S5336757 B2 JPS5336757 B2 JP S5336757B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5166772A
Other languages
Japanese (ja)
Other versions
JPS4911074A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5166772A priority Critical patent/JPS5336757B2/ja
Publication of JPS4911074A publication Critical patent/JPS4911074A/ja
Publication of JPS5336757B2 publication Critical patent/JPS5336757B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP5166772A 1972-05-26 1972-05-26 Expired JPS5336757B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5166772A JPS5336757B2 (enrdf_load_stackoverflow) 1972-05-26 1972-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5166772A JPS5336757B2 (enrdf_load_stackoverflow) 1972-05-26 1972-05-26

Publications (2)

Publication Number Publication Date
JPS4911074A JPS4911074A (enrdf_load_stackoverflow) 1974-01-31
JPS5336757B2 true JPS5336757B2 (enrdf_load_stackoverflow) 1978-10-04

Family

ID=12893220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5166772A Expired JPS5336757B2 (enrdf_load_stackoverflow) 1972-05-26 1972-05-26

Country Status (1)

Country Link
JP (1) JPS5336757B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595090U (enrdf_load_stackoverflow) * 1978-12-22 1980-07-01

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547277A (en) * 1977-06-20 1979-01-19 Nippon Telegr & Teleph Corp <Ntt> Fine adjustment unit for stage
JPS5831404Y2 (ja) * 1981-08-13 1983-07-12 日本電信電話株式会社 ステ−ジの上下，左右傾斜及び前後傾斜微動装置
JPS587111U (ja) * 1982-06-18 1983-01-18 日本電信電話株式会社 ステ−ジの回転微動装置
JPS6080802U (ja) * 1983-11-09 1985-06-05 株式会社昌運工作所 微調整刃物台
JPH0232359Y2 (enrdf_load_stackoverflow) * 1985-02-28 1990-09-03
JPS61151840U (enrdf_load_stackoverflow) * 1985-03-08 1986-09-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595090U (enrdf_load_stackoverflow) * 1978-12-22 1980-07-01

Also Published As

Publication number Publication date
JPS4911074A (enrdf_load_stackoverflow) 1974-01-31

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