JPS5334470B2 - - Google Patents

Info

Publication number
JPS5334470B2
JPS5334470B2 JP7413677A JP7413677A JPS5334470B2 JP S5334470 B2 JPS5334470 B2 JP S5334470B2 JP 7413677 A JP7413677 A JP 7413677A JP 7413677 A JP7413677 A JP 7413677A JP S5334470 B2 JPS5334470 B2 JP S5334470B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7413677A
Other languages
Japanese (ja)
Other versions
JPS5328379A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7413677A priority Critical patent/JPS5328379A/en
Publication of JPS5328379A publication Critical patent/JPS5328379A/en
Publication of JPS5334470B2 publication Critical patent/JPS5334470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP7413677A 1977-06-22 1977-06-22 Electron lens device Granted JPS5328379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7413677A JPS5328379A (en) 1977-06-22 1977-06-22 Electron lens device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7413677A JPS5328379A (en) 1977-06-22 1977-06-22 Electron lens device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3764276A Division JPS52147977A (en) 1976-04-02 1976-04-02 Electronic lens unit

Publications (2)

Publication Number Publication Date
JPS5328379A JPS5328379A (en) 1978-03-16
JPS5334470B2 true JPS5334470B2 (en) 1978-09-20

Family

ID=13538459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7413677A Granted JPS5328379A (en) 1977-06-22 1977-06-22 Electron lens device

Country Status (1)

Country Link
JP (1) JPS5328379A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120816U (en) * 1990-03-20 1991-12-11

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
JPS5941831A (en) * 1982-08-31 1984-03-08 Toshiba Corp Method for electron-beam drawing
JPS59135727A (en) * 1983-01-24 1984-08-04 Jeol Ltd Exposure by charged particle beam
JPS6211795U (en) * 1985-07-08 1987-01-24
JPS62115715A (en) * 1985-07-22 1987-05-27 Toshiba Mach Co Ltd Electron-beam exposure device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119080A (en) * 1976-03-31 1977-10-06 Fujitsu Ltd Electron beam exposure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119080A (en) * 1976-03-31 1977-10-06 Fujitsu Ltd Electron beam exposure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120816U (en) * 1990-03-20 1991-12-11

Also Published As

Publication number Publication date
JPS5328379A (en) 1978-03-16

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