JPS5334470B2 - - Google Patents
Info
- Publication number
- JPS5334470B2 JPS5334470B2 JP7413677A JP7413677A JPS5334470B2 JP S5334470 B2 JPS5334470 B2 JP S5334470B2 JP 7413677 A JP7413677 A JP 7413677A JP 7413677 A JP7413677 A JP 7413677A JP S5334470 B2 JPS5334470 B2 JP S5334470B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7413677A JPS5328379A (en) | 1977-06-22 | 1977-06-22 | Electron lens device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7413677A JPS5328379A (en) | 1977-06-22 | 1977-06-22 | Electron lens device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3764276A Division JPS52147977A (en) | 1976-04-02 | 1976-04-02 | Electronic lens unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5328379A JPS5328379A (en) | 1978-03-16 |
JPS5334470B2 true JPS5334470B2 (en) | 1978-09-20 |
Family
ID=13538459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7413677A Granted JPS5328379A (en) | 1977-06-22 | 1977-06-22 | Electron lens device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5328379A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120816U (en) * | 1990-03-20 | 1991-12-11 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2115976A (en) * | 1982-02-26 | 1983-09-14 | Philips Electronic Associated | Charged particle beam apparatus |
JPS5941831A (en) * | 1982-08-31 | 1984-03-08 | Toshiba Corp | Method for electron-beam drawing |
JPS59135727A (en) * | 1983-01-24 | 1984-08-04 | Jeol Ltd | Exposure by charged particle beam |
JPS6211795U (en) * | 1985-07-08 | 1987-01-24 | ||
JPS62115715A (en) * | 1985-07-22 | 1987-05-27 | Toshiba Mach Co Ltd | Electron-beam exposure device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52119080A (en) * | 1976-03-31 | 1977-10-06 | Fujitsu Ltd | Electron beam exposure |
-
1977
- 1977-06-22 JP JP7413677A patent/JPS5328379A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52119080A (en) * | 1976-03-31 | 1977-10-06 | Fujitsu Ltd | Electron beam exposure |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120816U (en) * | 1990-03-20 | 1991-12-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS5328379A (en) | 1978-03-16 |