JPS5334463B2 - - Google Patents
Info
- Publication number
- JPS5334463B2 JPS5334463B2 JP4279076A JP4279076A JPS5334463B2 JP S5334463 B2 JPS5334463 B2 JP S5334463B2 JP 4279076 A JP4279076 A JP 4279076A JP 4279076 A JP4279076 A JP 4279076A JP S5334463 B2 JPS5334463 B2 JP S5334463B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4279076A JPS52126177A (en) | 1976-04-15 | 1976-04-15 | Etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4279076A JPS52126177A (en) | 1976-04-15 | 1976-04-15 | Etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52126177A JPS52126177A (en) | 1977-10-22 |
| JPS5334463B2 true JPS5334463B2 (cs) | 1978-09-20 |
Family
ID=12645747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4279076A Granted JPS52126177A (en) | 1976-04-15 | 1976-04-15 | Etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52126177A (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5554939U (cs) * | 1978-10-09 | 1980-04-14 | ||
| JPS5678457U (cs) * | 1979-11-15 | 1981-06-25 | ||
| JPS57184224A (en) * | 1981-05-08 | 1982-11-12 | Fujitsu Ltd | Microwave plasma treating method and its device |
| JPH063801B2 (ja) * | 1983-11-18 | 1994-01-12 | 株式会社日立製作所 | マイクロ波プラズマ処理方法及び装置 |
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1976
- 1976-04-15 JP JP4279076A patent/JPS52126177A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52126177A (en) | 1977-10-22 |