JPS5334460B2 - - Google Patents
Info
- Publication number
- JPS5334460B2 JPS5334460B2 JP2618976A JP2618976A JPS5334460B2 JP S5334460 B2 JPS5334460 B2 JP S5334460B2 JP 2618976 A JP2618976 A JP 2618976A JP 2618976 A JP2618976 A JP 2618976A JP S5334460 B2 JPS5334460 B2 JP S5334460B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2618976A JPS52109874A (en) | 1976-03-12 | 1976-03-12 | Photo mask correcting unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2618976A JPS52109874A (en) | 1976-03-12 | 1976-03-12 | Photo mask correcting unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52109874A JPS52109874A (en) | 1977-09-14 |
| JPS5334460B2 true JPS5334460B2 (de) | 1978-09-20 |
Family
ID=12186543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2618976A Granted JPS52109874A (en) | 1976-03-12 | 1976-03-12 | Photo mask correcting unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52109874A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5527686A (en) * | 1978-08-21 | 1980-02-27 | Sony Corp | Projection eliminating device |
| JPS56162748A (en) * | 1980-05-21 | 1981-12-14 | Hitachi Ltd | Defect correcting method for photomask |
| JPS5871617A (ja) * | 1981-10-23 | 1983-04-28 | Nec Corp | レ−ザアニ−リング装置 |
| GB2414294B (en) | 2004-05-20 | 2006-08-02 | Teraview Ltd | Apparatus and method for investigating a sample |
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1976
- 1976-03-12 JP JP2618976A patent/JPS52109874A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52109874A (en) | 1977-09-14 |