JPS533347B2 - - Google Patents
Info
- Publication number
- JPS533347B2 JPS533347B2 JP176272A JP176272A JPS533347B2 JP S533347 B2 JPS533347 B2 JP S533347B2 JP 176272 A JP176272 A JP 176272A JP 176272 A JP176272 A JP 176272A JP S533347 B2 JPS533347 B2 JP S533347B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP176272A JPS533347B2 (en:Method) | 1972-01-05 | 1972-01-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP176272A JPS533347B2 (en:Method) | 1972-01-05 | 1972-01-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4873371A JPS4873371A (en:Method) | 1973-10-03 |
| JPS533347B2 true JPS533347B2 (en:Method) | 1978-02-06 |
Family
ID=11510579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP176272A Expired JPS533347B2 (en:Method) | 1972-01-05 | 1972-01-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS533347B2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379412U (en:Method) * | 1986-11-14 | 1988-05-25 | ||
| JPS63112250U (en:Method) * | 1987-01-13 | 1988-07-19 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5083264A (en:Method) * | 1973-11-28 | 1975-07-05 | ||
| JPS5092268A (en:Method) * | 1973-12-19 | 1975-07-23 | ||
| JPS5113378A (ja) * | 1974-07-23 | 1976-02-02 | Fuso Kk | Konodono ryukasuisono kyushujokyohohooyobisono sochi |
| JP5968159B2 (ja) | 2012-08-20 | 2016-08-10 | 三菱重工業株式会社 | Ｃｏ２回収装置およびｃｏ２回収方法 |
| WO2018150979A1 (ja) * | 2017-02-15 | 2018-08-23 | 東京エレクトロン株式会社 | 気体処理装置および基板処理装置 |
-
1972
- 1972-01-05 JP JP176272A patent/JPS533347B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379412U (en:Method) * | 1986-11-14 | 1988-05-25 | ||
| JPS63112250U (en:Method) * | 1987-01-13 | 1988-07-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4873371A (en:Method) | 1973-10-03 |