JPS5333068A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS5333068A JPS5333068A JP10727476A JP10727476A JPS5333068A JP S5333068 A JPS5333068 A JP S5333068A JP 10727476 A JP10727476 A JP 10727476A JP 10727476 A JP10727476 A JP 10727476A JP S5333068 A JPS5333068 A JP S5333068A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- dominoes
- allowance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To produce an allowance in the processing capacity of a computer and enhance the performance and reliability of the apparatus by reducing the transmission and reception of signals as small as possible, providing the function of a system clock to the signal being generated as the stage moves and causing each operation of the control system to take place in a falling-dominoes fashion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10727476A JPS5333068A (en) | 1976-09-09 | 1976-09-09 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10727476A JPS5333068A (en) | 1976-09-09 | 1976-09-09 | Electron beam exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333068A true JPS5333068A (en) | 1978-03-28 |
Family
ID=14454899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10727476A Pending JPS5333068A (en) | 1976-09-09 | 1976-09-09 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333068A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58212134A (en) * | 1982-01-28 | 1983-12-09 | Toshiba Corp | Evaluating method for characteristics of specimen base for charged beam exposure apparatus |
JPS62192671A (en) * | 1986-02-19 | 1987-08-24 | Rohm Co Ltd | Measuring method for electronic device |
-
1976
- 1976-09-09 JP JP10727476A patent/JPS5333068A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58212134A (en) * | 1982-01-28 | 1983-12-09 | Toshiba Corp | Evaluating method for characteristics of specimen base for charged beam exposure apparatus |
JPH0544176B2 (en) * | 1982-01-28 | 1993-07-05 | Tokyo Shibaura Electric Co | |
JPS62192671A (en) * | 1986-02-19 | 1987-08-24 | Rohm Co Ltd | Measuring method for electronic device |
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