JPS5331452B2 - - Google Patents

Info

Publication number
JPS5331452B2
JPS5331452B2 JP10897574A JP10897574A JPS5331452B2 JP S5331452 B2 JPS5331452 B2 JP S5331452B2 JP 10897574 A JP10897574 A JP 10897574A JP 10897574 A JP10897574 A JP 10897574A JP S5331452 B2 JPS5331452 B2 JP S5331452B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10897574A
Other languages
Japanese (ja)
Other versions
JPS5135635A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10897574A priority Critical patent/JPS5331452B2/ja
Publication of JPS5135635A publication Critical patent/JPS5135635A/ja
Publication of JPS5331452B2 publication Critical patent/JPS5331452B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10897574A 1974-09-20 1974-09-20 Expired JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10897574A JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-09-20 1974-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10897574A JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-09-20 1974-09-20

Publications (2)

Publication Number Publication Date
JPS5135635A JPS5135635A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-03-26
JPS5331452B2 true JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-09-02

Family

ID=14498385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10897574A Expired JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-09-20 1974-09-20

Country Status (1)

Country Link
JP (1) JPS5331452B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173948U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-05-30 1979-12-08
JPS6117620U (ja) * 1984-07-06 1986-02-01 秀重 相羽 光学式移動量測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112229A (en) * 1980-12-30 1982-07-13 Kyoei Zoki Kk Solid conveyor
JP6046406B2 (ja) 2011-07-26 2016-12-14 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC 高温耐性銀コート基体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4429710Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-12-19 1969-12-08
JPS5129502B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-07-01 1976-08-26
JPS5212327B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-08-10 1977-04-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173948U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-05-30 1979-12-08
JPS6117620U (ja) * 1984-07-06 1986-02-01 秀重 相羽 光学式移動量測定装置

Also Published As

Publication number Publication date
JPS5135635A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-03-26

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