JPS5331452B2 - - Google Patents

Info

Publication number
JPS5331452B2
JPS5331452B2 JP10897574A JP10897574A JPS5331452B2 JP S5331452 B2 JPS5331452 B2 JP S5331452B2 JP 10897574 A JP10897574 A JP 10897574A JP 10897574 A JP10897574 A JP 10897574A JP S5331452 B2 JPS5331452 B2 JP S5331452B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10897574A
Other versions
JPS5135635A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10897574A priority Critical patent/JPS5331452B2/ja
Publication of JPS5135635A publication Critical patent/JPS5135635A/ja
Publication of JPS5331452B2 publication Critical patent/JPS5331452B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10897574A 1974-09-20 1974-09-20 Expired JPS5331452B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10897574A JPS5331452B2 (ja) 1974-09-20 1974-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10897574A JPS5331452B2 (ja) 1974-09-20 1974-09-20

Publications (2)

Publication Number Publication Date
JPS5135635A JPS5135635A (ja) 1976-03-26
JPS5331452B2 true JPS5331452B2 (ja) 1978-09-02

Family

ID=14498385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10897574A Expired JPS5331452B2 (ja) 1974-09-20 1974-09-20

Country Status (1)

Country Link
JP (1) JPS5331452B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173948U (ja) * 1978-05-30 1979-12-08
JPS6117620U (ja) * 1984-07-06 1986-02-01 秀重 相羽 光学式移動量測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112229A (en) * 1980-12-30 1982-07-13 Kyoei Zoki Kk Solid conveyor
JP6046406B2 (ja) 2011-07-26 2016-12-14 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 高温耐性銀コート基体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4429710Y1 (ja) * 1964-12-19 1969-12-08
JPS4826669A (ja) * 1971-08-10 1973-04-07

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129502B2 (ja) * 1971-07-01 1976-08-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4429710Y1 (ja) * 1964-12-19 1969-12-08
JPS4826669A (ja) * 1971-08-10 1973-04-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173948U (ja) * 1978-05-30 1979-12-08
JPS6117620U (ja) * 1984-07-06 1986-02-01 秀重 相羽 光学式移動量測定装置

Also Published As

Publication number Publication date
JPS5135635A (ja) 1976-03-26

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