JPS5330991A - Filament exchanging method for vacuum evaporation apparatus - Google Patents

Filament exchanging method for vacuum evaporation apparatus

Info

Publication number
JPS5330991A
JPS5330991A JP10497276A JP10497276A JPS5330991A JP S5330991 A JPS5330991 A JP S5330991A JP 10497276 A JP10497276 A JP 10497276A JP 10497276 A JP10497276 A JP 10497276A JP S5330991 A JPS5330991 A JP S5330991A
Authority
JP
Japan
Prior art keywords
filament
evaporation apparatus
vacuum evaporation
exchanging method
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10497276A
Other languages
Japanese (ja)
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP10497276A priority Critical patent/JPS5330991A/en
Publication of JPS5330991A publication Critical patent/JPS5330991A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To prevent shortening of life of filament due to incomplete contact by loading another support with a filament, while evaporation is carried out, at outside of evaporation apparatus and independently of operation schedule.
JP10497276A 1976-09-03 1976-09-03 Filament exchanging method for vacuum evaporation apparatus Pending JPS5330991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10497276A JPS5330991A (en) 1976-09-03 1976-09-03 Filament exchanging method for vacuum evaporation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10497276A JPS5330991A (en) 1976-09-03 1976-09-03 Filament exchanging method for vacuum evaporation apparatus

Publications (1)

Publication Number Publication Date
JPS5330991A true JPS5330991A (en) 1978-03-23

Family

ID=14395005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10497276A Pending JPS5330991A (en) 1976-09-03 1976-09-03 Filament exchanging method for vacuum evaporation apparatus

Country Status (1)

Country Link
JP (1) JPS5330991A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165371A (en) * 1984-02-09 1985-08-28 Ricoh Co Ltd Vacuum apparatus and exchanging system of parts thereof
JPS63119248A (en) * 1987-10-23 1988-05-23 Hitachi Ltd Semiconductor device
JPS63211661A (en) * 1988-02-12 1988-09-02 Hitachi Ltd Lead frame
FR3005064A1 (en) * 2013-04-25 2014-10-31 Valeo Illuminacion VACUUM EVAPORATION METALLIZATION SYSTEM
WO2014191688A1 (en) * 2013-05-30 2014-12-04 Universite Claude Bernard Lyon I Sublimation head and implementation method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165371A (en) * 1984-02-09 1985-08-28 Ricoh Co Ltd Vacuum apparatus and exchanging system of parts thereof
JPS63119248A (en) * 1987-10-23 1988-05-23 Hitachi Ltd Semiconductor device
JPH0526340B2 (en) * 1987-10-23 1993-04-15 Hitachi Seisakusho Kk
JPS63211661A (en) * 1988-02-12 1988-09-02 Hitachi Ltd Lead frame
FR3005064A1 (en) * 2013-04-25 2014-10-31 Valeo Illuminacion VACUUM EVAPORATION METALLIZATION SYSTEM
WO2014191688A1 (en) * 2013-05-30 2014-12-04 Universite Claude Bernard Lyon I Sublimation head and implementation method

Similar Documents

Publication Publication Date Title
SE7711884L (en) STATEMENT
JPS5330991A (en) Filament exchanging method for vacuum evaporation apparatus
HU172649B (en) Process for producing new, biologically active lysergamides
JPS5218333A (en) Heating device
DK407479A (en) BETA-TRIAZOLYLOXIMS WITH PLANT GROWTH REGULATORY EFFECT
YU40433B (en) Process for obtaining pure, proteolytically active anzymes
JPS51148673A (en) A wet treatment process for exhaust gas
JPS5228470A (en) Process for removal of hydrogen sulfides in gases
JPS52134872A (en) Method and apparatus for gas/liquid contact and crystallization
JPS5218881A (en) Method for preparing aspartase with high activity
JPS5214577A (en) Contacting apparatus
JPS5375163A (en) Improving method for life of window foil of irradiataion window and incidencewindow in treating apparatus of radiation irradiating type for exhaust gas
JPS51151264A (en) A reliquefying apparatus of evaporation gas
JPS5235578A (en) Manufacturing process fo hot cathode grid control discharge tube containing hydrogen
JPS51128485A (en) A process for preparing stable insolubilized urease
JPS53114744A (en) Etching method
JPS5327977A (en) Coil vonveyor
JPS51116582A (en) Automatic transfer apparatus
JPS51116952A (en) Circuit operating method
JPS5393791A (en) Production of x-ray tube
JPS52104682A (en) Negative pressure reacting apparatus
JPS5314984A (en) Device for feeding charging gas into bulb
JPS53140873A (en) Method of coating electrode coil for bulb with cathod material
JPS5290163A (en) Method for treating aqueous solution containing formaldehyde
JPS51136092A (en) Wireless type sensible system