JPS5330591B2 - - Google Patents

Info

Publication number
JPS5330591B2
JPS5330591B2 JP4404674A JP4404674A JPS5330591B2 JP S5330591 B2 JPS5330591 B2 JP S5330591B2 JP 4404674 A JP4404674 A JP 4404674A JP 4404674 A JP4404674 A JP 4404674A JP S5330591 B2 JPS5330591 B2 JP S5330591B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4404674A
Other languages
Japanese (ja)
Other versions
JPS50137482A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4404674A priority Critical patent/JPS5330591B2/ja
Publication of JPS50137482A publication Critical patent/JPS50137482A/ja
Publication of JPS5330591B2 publication Critical patent/JPS5330591B2/ja
Expired legal-status Critical Current

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  • Element Separation (AREA)
JP4404674A 1974-04-18 1974-04-18 Expired JPS5330591B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4404674A JPS5330591B2 (cs) 1974-04-18 1974-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4404674A JPS5330591B2 (cs) 1974-04-18 1974-04-18

Publications (2)

Publication Number Publication Date
JPS50137482A JPS50137482A (cs) 1975-10-31
JPS5330591B2 true JPS5330591B2 (cs) 1978-08-28

Family

ID=12680660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4404674A Expired JPS5330591B2 (cs) 1974-04-18 1974-04-18

Country Status (1)

Country Link
JP (1) JPS5330591B2 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50147682A (cs) * 1974-05-15 1975-11-26
JPS5518082U (cs) * 1978-07-24 1980-02-05
JPS58158942A (ja) * 1982-03-17 1983-09-21 Hitachi Ltd 半導体集積回路装置とその製造法
JPS6266645A (ja) * 1985-09-18 1987-03-26 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345675B2 (cs) * 1971-10-12 1978-12-08

Also Published As

Publication number Publication date
JPS50137482A (cs) 1975-10-31

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