JPS5330432A - Process and apparatus for vacuum deposition - Google Patents

Process and apparatus for vacuum deposition

Info

Publication number
JPS5330432A
JPS5330432A JP10511176A JP10511176A JPS5330432A JP S5330432 A JPS5330432 A JP S5330432A JP 10511176 A JP10511176 A JP 10511176A JP 10511176 A JP10511176 A JP 10511176A JP S5330432 A JPS5330432 A JP S5330432A
Authority
JP
Japan
Prior art keywords
vacuum deposition
deposition
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10511176A
Other languages
English (en)
Inventor
Jiyusaburou Imamura
Shigeo Itano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP10511176A priority Critical patent/JPS5330432A/ja
Publication of JPS5330432A publication Critical patent/JPS5330432A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10511176A 1976-09-02 1976-09-02 Process and apparatus for vacuum deposition Pending JPS5330432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10511176A JPS5330432A (en) 1976-09-02 1976-09-02 Process and apparatus for vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10511176A JPS5330432A (en) 1976-09-02 1976-09-02 Process and apparatus for vacuum deposition

Publications (1)

Publication Number Publication Date
JPS5330432A true JPS5330432A (en) 1978-03-22

Family

ID=14398721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10511176A Pending JPS5330432A (en) 1976-09-02 1976-09-02 Process and apparatus for vacuum deposition

Country Status (1)

Country Link
JP (1) JPS5330432A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385738A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Device of feeding molten metal to vacuum chamber
JPS5944771U (ja) * 1982-09-17 1984-03-24 三菱重工業株式会社 真空蒸着炉のスノ−ケル管
JPS63199868A (ja) * 1987-02-13 1988-08-18 Mitsubishi Heavy Ind Ltd 真空蒸発装置内の溶融金属レベル制御装置
JP2010144221A (ja) * 2008-12-18 2010-07-01 Tokyo Electron Ltd 原料ガス発生装置及び成膜装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385738A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Device of feeding molten metal to vacuum chamber
JPS5944771U (ja) * 1982-09-17 1984-03-24 三菱重工業株式会社 真空蒸着炉のスノ−ケル管
JPS63199868A (ja) * 1987-02-13 1988-08-18 Mitsubishi Heavy Ind Ltd 真空蒸発装置内の溶融金属レベル制御装置
JP2010144221A (ja) * 2008-12-18 2010-07-01 Tokyo Electron Ltd 原料ガス発生装置及び成膜装置

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