JPS5330304A - Formation of protective film of silicon nitride for magnetic recording medium - Google Patents

Formation of protective film of silicon nitride for magnetic recording medium

Info

Publication number
JPS5330304A
JPS5330304A JP10453176A JP10453176A JPS5330304A JP S5330304 A JPS5330304 A JP S5330304A JP 10453176 A JP10453176 A JP 10453176A JP 10453176 A JP10453176 A JP 10453176A JP S5330304 A JPS5330304 A JP S5330304A
Authority
JP
Japan
Prior art keywords
recording medium
magnetic recording
formation
protective film
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10453176A
Other languages
Japanese (ja)
Other versions
JPS5539047B2 (en
Inventor
Takeo Hinobayashi
Masaki Shinohara
Kazuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10453176A priority Critical patent/JPS5330304A/en
Publication of JPS5330304A publication Critical patent/JPS5330304A/en
Publication of JPS5539047B2 publication Critical patent/JPS5539047B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve abrasion resistance and its playback performance and enable easier spattering by effecting spattering Si3N4 in a specific atmosphere on a magnetic recording medium in which float-type magnetic head is employed.
JP10453176A 1976-09-01 1976-09-01 Formation of protective film of silicon nitride for magnetic recording medium Granted JPS5330304A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10453176A JPS5330304A (en) 1976-09-01 1976-09-01 Formation of protective film of silicon nitride for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10453176A JPS5330304A (en) 1976-09-01 1976-09-01 Formation of protective film of silicon nitride for magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS5330304A true JPS5330304A (en) 1978-03-22
JPS5539047B2 JPS5539047B2 (en) 1980-10-08

Family

ID=14383066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10453176A Granted JPS5330304A (en) 1976-09-01 1976-09-01 Formation of protective film of silicon nitride for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5330304A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730124A (en) * 1980-07-29 1982-02-18 Nippon Telegr & Teleph Corp <Ntt> Protective film for magnetic recording medium
JPS59217229A (en) * 1983-05-24 1984-12-07 Hitachi Condenser Co Ltd Magnetic recording medium
JPH03156755A (en) * 1990-10-19 1991-07-04 Sharp Corp Production of optical memory device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730124A (en) * 1980-07-29 1982-02-18 Nippon Telegr & Teleph Corp <Ntt> Protective film for magnetic recording medium
JPS6161444B2 (en) * 1980-07-29 1986-12-25 Nippon Telegraph & Telephone
JPS59217229A (en) * 1983-05-24 1984-12-07 Hitachi Condenser Co Ltd Magnetic recording medium
JPH03156755A (en) * 1990-10-19 1991-07-04 Sharp Corp Production of optical memory device
JPH0542063B2 (en) * 1990-10-19 1993-06-25 Sharp Kk

Also Published As

Publication number Publication date
JPS5539047B2 (en) 1980-10-08

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