JPS5329472B2 - - Google Patents
Info
- Publication number
- JPS5329472B2 JPS5329472B2 JP8466273A JP8466273A JPS5329472B2 JP S5329472 B2 JPS5329472 B2 JP S5329472B2 JP 8466273 A JP8466273 A JP 8466273A JP 8466273 A JP8466273 A JP 8466273A JP S5329472 B2 JPS5329472 B2 JP S5329472B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/2447—Imaging plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24592—Inspection and quality control of devices
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8466273A JPS5329472B2 (enrdf_load_stackoverflow) | 1973-07-27 | 1973-07-27 | |
| GB3063974A GB1432887A (en) | 1973-07-27 | 1974-07-10 | Scanning electron microscope |
| NL7409907A NL177161C (nl) | 1973-07-27 | 1974-07-23 | Aftastende elektronenmicroscoop voor het weergeven van een doorgelaten elektronenbeeld. |
| US05/491,835 US4068123A (en) | 1973-07-27 | 1974-07-25 | Scanning electron microscope |
| FR7425921A FR2220871B1 (enrdf_load_stackoverflow) | 1973-07-27 | 1974-07-25 | |
| DE2436160A DE2436160C3 (de) | 1973-07-27 | 1974-07-26 | Rasterelektronenmikroskop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8466273A JPS5329472B2 (enrdf_load_stackoverflow) | 1973-07-27 | 1973-07-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5034158A JPS5034158A (enrdf_load_stackoverflow) | 1975-04-02 |
| JPS5329472B2 true JPS5329472B2 (enrdf_load_stackoverflow) | 1978-08-21 |
Family
ID=13836921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8466273A Expired JPS5329472B2 (enrdf_load_stackoverflow) | 1973-07-27 | 1973-07-27 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5329472B2 (enrdf_load_stackoverflow) |
| GB (1) | GB1432887A (enrdf_load_stackoverflow) |
| NL (1) | NL177161C (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216160A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Electron beam detection device |
| GB8509493D0 (en) * | 1985-04-12 | 1985-05-15 | Plessey Co Plc | Scanning microscopes |
| DE3540916A1 (de) * | 1985-11-19 | 1987-05-21 | Zeiss Carl Fa | Verfahren und vorrichtung zur raster-lichtmikroskopischen darstellung von objekten im dunkelfeld |
| JP4187544B2 (ja) * | 2003-02-25 | 2008-11-26 | 富士通株式会社 | 走査透過型電子顕微鏡 |
-
1973
- 1973-07-27 JP JP8466273A patent/JPS5329472B2/ja not_active Expired
-
1974
- 1974-07-10 GB GB3063974A patent/GB1432887A/en not_active Expired
- 1974-07-23 NL NL7409907A patent/NL177161C/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| GB1432887A (en) | 1976-04-22 |
| NL7409907A (nl) | 1975-01-29 |
| NL177161C (nl) | 1985-08-01 |
| NL177161B (nl) | 1985-03-01 |
| JPS5034158A (enrdf_load_stackoverflow) | 1975-04-02 |