JPS5329472B2 - - Google Patents

Info

Publication number
JPS5329472B2
JPS5329472B2 JP8466273A JP8466273A JPS5329472B2 JP S5329472 B2 JPS5329472 B2 JP S5329472B2 JP 8466273 A JP8466273 A JP 8466273A JP 8466273 A JP8466273 A JP 8466273A JP S5329472 B2 JPS5329472 B2 JP S5329472B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8466273A
Other languages
Japanese (ja)
Other versions
JPS5034158A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8466273A priority Critical patent/JPS5329472B2/ja
Priority to GB3063974A priority patent/GB1432887A/en
Priority to NL7409907A priority patent/NL177161C/xx
Priority to FR7425921A priority patent/FR2220871B1/fr
Priority to US05/491,835 priority patent/US4068123A/en
Priority to DE2436160A priority patent/DE2436160C3/de
Publication of JPS5034158A publication Critical patent/JPS5034158A/ja
Publication of JPS5329472B2 publication Critical patent/JPS5329472B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/2447—Imaging plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP8466273A 1973-07-27 1973-07-27 Expired JPS5329472B2 (cs)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP8466273A JPS5329472B2 (cs) 1973-07-27 1973-07-27
GB3063974A GB1432887A (en) 1973-07-27 1974-07-10 Scanning electron microscope
NL7409907A NL177161C (nl) 1973-07-27 1974-07-23 Aftastende elektronenmicroscoop voor het weergeven van een doorgelaten elektronenbeeld.
FR7425921A FR2220871B1 (cs) 1973-07-27 1974-07-25
US05/491,835 US4068123A (en) 1973-07-27 1974-07-25 Scanning electron microscope
DE2436160A DE2436160C3 (de) 1973-07-27 1974-07-26 Rasterelektronenmikroskop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8466273A JPS5329472B2 (cs) 1973-07-27 1973-07-27

Publications (2)

Publication Number Publication Date
JPS5034158A JPS5034158A (cs) 1975-04-02
JPS5329472B2 true JPS5329472B2 (cs) 1978-08-21

Family

ID=13836921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8466273A Expired JPS5329472B2 (cs) 1973-07-27 1973-07-27

Country Status (3)

Country Link
JP (1) JPS5329472B2 (cs)
GB (1) GB1432887A (cs)
NL (1) NL177161C (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216160A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Electron beam detection device
GB8509493D0 (en) * 1985-04-12 1985-05-15 Plessey Co Plc Scanning microscopes
DE3540916A1 (de) * 1985-11-19 1987-05-21 Zeiss Carl Fa Verfahren und vorrichtung zur raster-lichtmikroskopischen darstellung von objekten im dunkelfeld
JP4187544B2 (ja) * 2003-02-25 2008-11-26 富士通株式会社 走査透過型電子顕微鏡

Also Published As

Publication number Publication date
JPS5034158A (cs) 1975-04-02
NL177161B (nl) 1985-03-01
NL7409907A (nl) 1975-01-29
GB1432887A (en) 1976-04-22
NL177161C (nl) 1985-08-01

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