JPS5325997A - Laser scribing method - Google Patents

Laser scribing method

Info

Publication number
JPS5325997A
JPS5325997A JP7996677A JP7996677A JPS5325997A JP S5325997 A JPS5325997 A JP S5325997A JP 7996677 A JP7996677 A JP 7996677A JP 7996677 A JP7996677 A JP 7996677A JP S5325997 A JPS5325997 A JP S5325997A
Authority
JP
Japan
Prior art keywords
scribing method
laser scribing
laser
scribing
varyign
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7996677A
Other languages
English (en)
Other versions
JPS5330987B2 (ja
Inventor
Ken Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7996677A priority Critical patent/JPS5325997A/ja
Publication of JPS5325997A publication Critical patent/JPS5325997A/ja
Publication of JPS5330987B2 publication Critical patent/JPS5330987B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Dicing (AREA)
  • Lasers (AREA)
JP7996677A 1977-07-06 1977-07-06 Laser scribing method Granted JPS5325997A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7996677A JPS5325997A (en) 1977-07-06 1977-07-06 Laser scribing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7996677A JPS5325997A (en) 1977-07-06 1977-07-06 Laser scribing method

Publications (2)

Publication Number Publication Date
JPS5325997A true JPS5325997A (en) 1978-03-10
JPS5330987B2 JPS5330987B2 (ja) 1978-08-30

Family

ID=13705044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7996677A Granted JPS5325997A (en) 1977-07-06 1977-07-06 Laser scribing method

Country Status (1)

Country Link
JP (1) JPS5325997A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100626983B1 (ko) * 1999-06-18 2006-09-22 미쓰보시 다이야몬도 고교 가부시키가이샤 레이저를 이용한 스크라이브 방법
JPWO2006070825A1 (ja) * 2004-12-28 2008-06-12 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法および基板分断システム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730904U (ja) * 1993-11-18 1995-06-13 日興電子工業株式会社 くいきり

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100626983B1 (ko) * 1999-06-18 2006-09-22 미쓰보시 다이야몬도 고교 가부시키가이샤 레이저를 이용한 스크라이브 방법
JPWO2006070825A1 (ja) * 2004-12-28 2008-06-12 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法および基板分断システム
JP4666391B2 (ja) * 2004-12-28 2011-04-06 三星ダイヤモンド工業株式会社 ガラス基板の分断方法

Also Published As

Publication number Publication date
JPS5330987B2 (ja) 1978-08-30

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