JPS5324304B2 - - Google Patents
Info
- Publication number
- JPS5324304B2 JPS5324304B2 JP3896375A JP3896375A JPS5324304B2 JP S5324304 B2 JPS5324304 B2 JP S5324304B2 JP 3896375 A JP3896375 A JP 3896375A JP 3896375 A JP3896375 A JP 3896375A JP S5324304 B2 JPS5324304 B2 JP S5324304B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3896375A JPS51114071A (en) | 1975-03-31 | 1975-03-31 | Gas etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3896375A JPS51114071A (en) | 1975-03-31 | 1975-03-31 | Gas etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51114071A JPS51114071A (en) | 1976-10-07 |
| JPS5324304B2 true JPS5324304B2 (zh) | 1978-07-20 |
Family
ID=12539813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3896375A Granted JPS51114071A (en) | 1975-03-31 | 1975-03-31 | Gas etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51114071A (zh) |
-
1975
- 1975-03-31 JP JP3896375A patent/JPS51114071A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51114071A (en) | 1976-10-07 |