JPS51114071A - Gas etching method - Google Patents

Gas etching method

Info

Publication number
JPS51114071A
JPS51114071A JP3896375A JP3896375A JPS51114071A JP S51114071 A JPS51114071 A JP S51114071A JP 3896375 A JP3896375 A JP 3896375A JP 3896375 A JP3896375 A JP 3896375A JP S51114071 A JPS51114071 A JP S51114071A
Authority
JP
Japan
Prior art keywords
etching method
gas etching
samples
gas
variation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3896375A
Other languages
English (en)
Other versions
JPS5324304B2 (ja
Inventor
Masahiro Shibagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3896375A priority Critical patent/JPS51114071A/ja
Publication of JPS51114071A publication Critical patent/JPS51114071A/ja
Publication of JPS5324304B2 publication Critical patent/JPS5324304B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3896375A 1975-03-31 1975-03-31 Gas etching method Granted JPS51114071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3896375A JPS51114071A (en) 1975-03-31 1975-03-31 Gas etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3896375A JPS51114071A (en) 1975-03-31 1975-03-31 Gas etching method

Publications (2)

Publication Number Publication Date
JPS51114071A true JPS51114071A (en) 1976-10-07
JPS5324304B2 JPS5324304B2 (ja) 1978-07-20

Family

ID=12539813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3896375A Granted JPS51114071A (en) 1975-03-31 1975-03-31 Gas etching method

Country Status (1)

Country Link
JP (1) JPS51114071A (ja)

Also Published As

Publication number Publication date
JPS5324304B2 (ja) 1978-07-20

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