JPS5324248B2 - - Google Patents

Info

Publication number
JPS5324248B2
JPS5324248B2 JP9866473A JP9866473A JPS5324248B2 JP S5324248 B2 JPS5324248 B2 JP S5324248B2 JP 9866473 A JP9866473 A JP 9866473A JP 9866473 A JP9866473 A JP 9866473A JP S5324248 B2 JPS5324248 B2 JP S5324248B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9866473A
Other languages
Japanese (ja)
Other versions
JPS5052937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9866473A priority Critical patent/JPS5324248B2/ja
Publication of JPS5052937A publication Critical patent/JPS5052937A/ja
Priority to US05/729,186 priority patent/USRE29461E/en
Publication of JPS5324248B2 publication Critical patent/JPS5324248B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Holo Graphy (AREA)
JP9866473A 1973-08-31 1973-08-31 Expired JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9866473A JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-31 1973-08-31
US05/729,186 USRE29461E (en) 1973-08-31 1976-10-04 Hologram graphic data tablet apparatus using a vernier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9866473A JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-31 1973-08-31

Publications (2)

Publication Number Publication Date
JPS5052937A JPS5052937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-05-10
JPS5324248B2 true JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-19

Family

ID=14225765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9866473A Expired JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-31 1973-08-31

Country Status (1)

Country Link
JP (1) JPS5324248B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153875U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-04-19 1979-10-25
JPS60130841A (ja) * 1983-12-20 1985-07-12 Marine Instr Co Ltd ウエハ−移載装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153875U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-04-19 1979-10-25
JPS60130841A (ja) * 1983-12-20 1985-07-12 Marine Instr Co Ltd ウエハ−移載装置

Also Published As

Publication number Publication date
JPS5052937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-05-10

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