JPS5322878A - Vacuum evaporation apparatus - Google Patents

Vacuum evaporation apparatus

Info

Publication number
JPS5322878A
JPS5322878A JP9783576A JP9783576A JPS5322878A JP S5322878 A JPS5322878 A JP S5322878A JP 9783576 A JP9783576 A JP 9783576A JP 9783576 A JP9783576 A JP 9783576A JP S5322878 A JPS5322878 A JP S5322878A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
evaporation apparatus
vacuum
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9783576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS556706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tsutomu Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akai Electric Co Ltd
Original Assignee
Akai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akai Electric Co Ltd filed Critical Akai Electric Co Ltd
Priority to JP9783576A priority Critical patent/JPS5322878A/ja
Publication of JPS5322878A publication Critical patent/JPS5322878A/ja
Publication of JPS556706B2 publication Critical patent/JPS556706B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9783576A 1976-08-13 1976-08-13 Vacuum evaporation apparatus Granted JPS5322878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9783576A JPS5322878A (en) 1976-08-13 1976-08-13 Vacuum evaporation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9783576A JPS5322878A (en) 1976-08-13 1976-08-13 Vacuum evaporation apparatus

Publications (2)

Publication Number Publication Date
JPS5322878A true JPS5322878A (en) 1978-03-02
JPS556706B2 JPS556706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-02-19

Family

ID=14202764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9783576A Granted JPS5322878A (en) 1976-08-13 1976-08-13 Vacuum evaporation apparatus

Country Status (1)

Country Link
JP (1) JPS5322878A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film

Also Published As

Publication number Publication date
JPS556706B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-02-19

Similar Documents

Publication Publication Date Title
JPS5336705A (en) Vacuum waterrdischarge means
GB2061474B (en) Vacuum apparatus
JPS52128680A (en) Vacuum curet device
GB1549907A (en) Vacuum operated can-conveying and canuprighting apparatus
JPS55152173A (en) Vacuum apparatus
ZA776985B (en) Vapor condensing apparatus
JPS52128968A (en) Method of vacuum evaporation
JPS54138279A (en) Vacuum pickkup device
AU2521677A (en) Apparatus
JPS5487684A (en) Vacuum evaporation method
JPS553699A (en) Vacuum device
GB2011797B (en) Vacuum filterbelt apparatus
JPS5347383A (en) Vacuum evaporation apparatus
GB2012179B (en) Vacuum filterbelt apparatus
GB1544568A (en) Pump-calibrating apparatus
JPS52112161A (en) Vacuum bottle
JPS5322878A (en) Vacuum evaporation apparatus
JPS5353055A (en) Vacuum botlle
JPS52100792A (en) Medical vacuum device
JPS52115417A (en) Vacuum means
JPS52148489A (en) Vacuum evaporation process
JPS5435177A (en) Vacuum evaporation apparatus
JPS5366054A (en) Vacuum dryer
JPS52149274A (en) Process for forming vacuum evaporation film
EG12266A (en) Evaporation apparatus