JPS5321271B2 - - Google Patents

Info

Publication number
JPS5321271B2
JPS5321271B2 JP9244472A JP9244472A JPS5321271B2 JP S5321271 B2 JPS5321271 B2 JP S5321271B2 JP 9244472 A JP9244472 A JP 9244472A JP 9244472 A JP9244472 A JP 9244472A JP S5321271 B2 JPS5321271 B2 JP S5321271B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9244472A
Other languages
Japanese (ja)
Other versions
JPS4949576A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9244472A priority Critical patent/JPS5321271B2/ja
Publication of JPS4949576A publication Critical patent/JPS4949576A/ja
Publication of JPS5321271B2 publication Critical patent/JPS5321271B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9244472A 1972-09-14 1972-09-14 Expired JPS5321271B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9244472A JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9244472A JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Publications (2)

Publication Number Publication Date
JPS4949576A JPS4949576A (enrdf_load_stackoverflow) 1974-05-14
JPS5321271B2 true JPS5321271B2 (enrdf_load_stackoverflow) 1978-07-01

Family

ID=14054569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9244472A Expired JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Country Status (1)

Country Link
JP (1) JPS5321271B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8717448U1 (de) * 1987-02-06 1988-12-29 Dr. Johannes Heidenhain Gmbh, 83301 Traunreut Bestrahlungsmaske zur lithographischen Erzeugung von Mustern

Also Published As

Publication number Publication date
JPS4949576A (enrdf_load_stackoverflow) 1974-05-14

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