JPS4949576A - - Google Patents

Info

Publication number
JPS4949576A
JPS4949576A JP9244472A JP9244472A JPS4949576A JP S4949576 A JPS4949576 A JP S4949576A JP 9244472 A JP9244472 A JP 9244472A JP 9244472 A JP9244472 A JP 9244472A JP S4949576 A JPS4949576 A JP S4949576A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9244472A
Other languages
Japanese (ja)
Other versions
JPS5321271B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9244472A priority Critical patent/JPS5321271B2/ja
Publication of JPS4949576A publication Critical patent/JPS4949576A/ja
Publication of JPS5321271B2 publication Critical patent/JPS5321271B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9244472A 1972-09-14 1972-09-14 Expired JPS5321271B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9244472A JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9244472A JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Publications (2)

Publication Number Publication Date
JPS4949576A true JPS4949576A (enrdf_load_stackoverflow) 1974-05-14
JPS5321271B2 JPS5321271B2 (enrdf_load_stackoverflow) 1978-07-01

Family

ID=14054569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9244472A Expired JPS5321271B2 (enrdf_load_stackoverflow) 1972-09-14 1972-09-14

Country Status (1)

Country Link
JP (1) JPS5321271B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202022A (ja) * 1987-02-06 1988-08-22 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング リゾグラフイによるパターンの形成のための露光マスク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202022A (ja) * 1987-02-06 1988-08-22 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング リゾグラフイによるパターンの形成のための露光マスク

Also Published As

Publication number Publication date
JPS5321271B2 (enrdf_load_stackoverflow) 1978-07-01

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