JPS5320392B2 - - Google Patents
Info
- Publication number
- JPS5320392B2 JPS5320392B2 JP3418576A JP3418576A JPS5320392B2 JP S5320392 B2 JPS5320392 B2 JP S5320392B2 JP 3418576 A JP3418576 A JP 3418576A JP 3418576 A JP3418576 A JP 3418576A JP S5320392 B2 JPS5320392 B2 JP S5320392B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418576A JPS52117577A (en) | 1976-03-30 | 1976-03-30 | Electron beam exposing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418576A JPS52117577A (en) | 1976-03-30 | 1976-03-30 | Electron beam exposing unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52117577A JPS52117577A (en) | 1977-10-03 |
| JPS5320392B2 true JPS5320392B2 (https=) | 1978-06-26 |
Family
ID=12407129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3418576A Granted JPS52117577A (en) | 1976-03-30 | 1976-03-30 | Electron beam exposing unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52117577A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147238A (en) * | 1981-03-06 | 1982-09-11 | Hitachi Ltd | Electron ray drawing device |
| JP2008207882A (ja) * | 2008-06-10 | 2008-09-11 | Moenickheim Peter | 水を主成分とする製品のための新規なパッケージング及びデリバリシステム |
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1976
- 1976-03-30 JP JP3418576A patent/JPS52117577A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52117577A (en) | 1977-10-03 |