JPS5319663A - Cleaning chamber dealing with harmful substance - Google Patents

Cleaning chamber dealing with harmful substance

Info

Publication number
JPS5319663A
JPS5319663A JP9340776A JP9340776A JPS5319663A JP S5319663 A JPS5319663 A JP S5319663A JP 9340776 A JP9340776 A JP 9340776A JP 9340776 A JP9340776 A JP 9340776A JP S5319663 A JPS5319663 A JP S5319663A
Authority
JP
Japan
Prior art keywords
dealing
cleaning chamber
harmful substance
harmful
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9340776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS556811B2 (enrdf_load_stackoverflow
Inventor
Tomoo Hiratsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON EAATETSUKU KK
Original Assignee
NIPPON EAATETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON EAATETSUKU KK filed Critical NIPPON EAATETSUKU KK
Priority to JP9340776A priority Critical patent/JPS5319663A/ja
Publication of JPS5319663A publication Critical patent/JPS5319663A/ja
Publication of JPS556811B2 publication Critical patent/JPS556811B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP9340776A 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance Granted JPS5319663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9340776A JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9340776A JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Publications (2)

Publication Number Publication Date
JPS5319663A true JPS5319663A (en) 1978-02-23
JPS556811B2 JPS556811B2 (enrdf_load_stackoverflow) 1980-02-20

Family

ID=14081434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9340776A Granted JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Country Status (1)

Country Link
JP (1) JPS5319663A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788004U (enrdf_load_stackoverflow) * 1980-11-18 1982-05-31
JPS63146702U (enrdf_load_stackoverflow) * 1987-03-19 1988-09-28
JPH027514U (enrdf_load_stackoverflow) * 1988-06-28 1990-01-18
JPH0212614U (enrdf_load_stackoverflow) * 1988-07-07 1990-01-26

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (enrdf_load_stackoverflow) * 1973-08-03 1975-04-08
JPS5131566U (enrdf_load_stackoverflow) * 1974-08-30 1976-03-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (enrdf_load_stackoverflow) * 1973-08-03 1975-04-08
JPS5131566U (enrdf_load_stackoverflow) * 1974-08-30 1976-03-08

Also Published As

Publication number Publication date
JPS556811B2 (enrdf_load_stackoverflow) 1980-02-20

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