JPS5319415B2 - - Google Patents

Info

Publication number
JPS5319415B2
JPS5319415B2 JP7251573A JP7251573A JPS5319415B2 JP S5319415 B2 JPS5319415 B2 JP S5319415B2 JP 7251573 A JP7251573 A JP 7251573A JP 7251573 A JP7251573 A JP 7251573A JP S5319415 B2 JPS5319415 B2 JP S5319415B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7251573A
Other languages
Japanese (ja)
Other versions
JPS5022658A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7251573A priority Critical patent/JPS5319415B2/ja
Publication of JPS5022658A publication Critical patent/JPS5022658A/ja
Publication of JPS5319415B2 publication Critical patent/JPS5319415B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP7251573A 1973-06-27 1973-06-27 Expired JPS5319415B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7251573A JPS5319415B2 (enExample) 1973-06-27 1973-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7251573A JPS5319415B2 (enExample) 1973-06-27 1973-06-27

Publications (2)

Publication Number Publication Date
JPS5022658A JPS5022658A (enExample) 1975-03-11
JPS5319415B2 true JPS5319415B2 (enExample) 1978-06-21

Family

ID=13491536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7251573A Expired JPS5319415B2 (enExample) 1973-06-27 1973-06-27

Country Status (1)

Country Link
JP (1) JPS5319415B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340963A (ja) * 2003-05-13 2004-12-02 Berkin Bv Ct法で測定するための質量流量計

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01282427A (ja) * 1988-05-09 1989-11-14 Nec Corp 流量制御装置
JPH03119722U (enExample) * 1990-03-20 1991-12-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340963A (ja) * 2003-05-13 2004-12-02 Berkin Bv Ct法で測定するための質量流量計

Also Published As

Publication number Publication date
JPS5022658A (enExample) 1975-03-11

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