JPS5318733B2 - - Google Patents
Info
- Publication number
- JPS5318733B2 JPS5318733B2 JP5922773A JP5922773A JPS5318733B2 JP S5318733 B2 JPS5318733 B2 JP S5318733B2 JP 5922773 A JP5922773 A JP 5922773A JP 5922773 A JP5922773 A JP 5922773A JP S5318733 B2 JPS5318733 B2 JP S5318733B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Discharge Heating (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25742972A | 1972-05-26 | 1972-05-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4943240A JPS4943240A (https=) | 1974-04-23 |
| JPS5318733B2 true JPS5318733B2 (https=) | 1978-06-16 |
Family
ID=22976275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5922773A Expired JPS5318733B2 (https=) | 1972-05-26 | 1973-05-26 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3748365A (https=) |
| JP (1) | JPS5318733B2 (https=) |
| CA (1) | CA981758A (https=) |
| DE (1) | DE2325995A1 (https=) |
| FR (1) | FR2189977B1 (https=) |
| GB (1) | GB1381686A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10155894B2 (en) | 2014-07-07 | 2018-12-18 | Honeywell International Inc. | Thermal interface material with ion scavenger |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS564951B2 (https=) * | 1973-01-25 | 1981-02-02 | ||
| US4171462A (en) * | 1977-05-19 | 1979-10-16 | Jersey Nuclear-Avco Isotopes, Inc. | Linear electron beam gun evaporator having uniform electron emission |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3068309A (en) * | 1960-06-22 | 1962-12-11 | Stauffer Chemical Co | Electron beam furnace with multiple field guidance of electrons |
| NL287527A (https=) * | 1962-01-15 | |||
| DE1439983A1 (de) * | 1962-10-04 | 1969-03-13 | Lokomotivbau Elektrotech | Elektronenstrahler,vorzugsweise fuer Elektronenstrahl-Schmelzoefen mit sehr hohen Leistungen |
| FR1482795A (fr) * | 1965-06-11 | 1967-05-26 | Temescal Metallurgical Corp | Appareil à un ou plusieurs faisceaux électroniques, à vide poussé, et procédé de commande d'un tel appareil |
| US3409729A (en) * | 1966-12-16 | 1968-11-05 | Air Reduction | Electron beam furnace and method for heating a target therein |
| US3506871A (en) * | 1967-05-29 | 1970-04-14 | Air Reduction | Electron beam gun having elongated tensioned emitter |
| US3701915A (en) * | 1971-01-04 | 1972-10-31 | Air Reduction | Electron beam gun |
-
1972
- 1972-05-26 US US00257429A patent/US3748365A/en not_active Expired - Lifetime
-
1973
- 1973-05-10 CA CA170,919A patent/CA981758A/en not_active Expired
- 1973-05-17 GB GB2354973A patent/GB1381686A/en not_active Expired
- 1973-05-22 DE DE2325995A patent/DE2325995A1/de active Pending
- 1973-05-25 FR FR7319044A patent/FR2189977B1/fr not_active Expired
- 1973-05-26 JP JP5922773A patent/JPS5318733B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10155894B2 (en) | 2014-07-07 | 2018-12-18 | Honeywell International Inc. | Thermal interface material with ion scavenger |
Also Published As
| Publication number | Publication date |
|---|---|
| CA981758A (en) | 1976-01-13 |
| US3748365A (en) | 1973-07-24 |
| FR2189977A1 (https=) | 1974-01-25 |
| FR2189977B1 (https=) | 1978-06-30 |
| JPS4943240A (https=) | 1974-04-23 |
| DE2325995A1 (de) | 1973-12-06 |
| GB1381686A (en) | 1975-01-22 |