JPS5317031B2 - - Google Patents

Info

Publication number
JPS5317031B2
JPS5317031B2 JP2878872A JP2878872A JPS5317031B2 JP S5317031 B2 JPS5317031 B2 JP S5317031B2 JP 2878872 A JP2878872 A JP 2878872A JP 2878872 A JP2878872 A JP 2878872A JP S5317031 B2 JPS5317031 B2 JP S5317031B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2878872A
Other languages
Japanese (ja)
Other versions
JPS4896088A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2878872A priority Critical patent/JPS5317031B2/ja
Priority to DE2313604A priority patent/DE2313604C3/de
Priority to CA166,425A priority patent/CA959975A/en
Priority to IT21904/73A priority patent/IT981527B/it
Priority to FR7310201A priority patent/FR2180687B1/fr
Priority to GB1359073A priority patent/GB1418519A/en
Publication of JPS4896088A publication Critical patent/JPS4896088A/ja
Priority to US05/531,447 priority patent/US4011577A/en
Publication of JPS5317031B2 publication Critical patent/JPS5317031B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50Devices controlled by mechanical forces, e.g. pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117Shapes of semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82Heterojunctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
JP2878872A 1972-03-21 1972-03-21 Expired JPS5317031B2 (cs)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2878872A JPS5317031B2 (cs) 1972-03-21 1972-03-21
DE2313604A DE2313604C3 (de) 1972-03-21 1973-03-19 Mechanisch-elektrischer Wandler
CA166,425A CA959975A (en) 1972-03-21 1973-03-19 Semiconductor mechanical-electrical transducer and method of making
IT21904/73A IT981527B (it) 1972-03-21 1973-03-21 Trasduttore elettromeccanico a semiconduttore e procedimento per fabbricarlo
FR7310201A FR2180687B1 (cs) 1972-03-21 1973-03-21
GB1359073A GB1418519A (en) 1972-03-21 1973-03-21 Pressure sensitive semiconductor device and method of manufacture thereof
US05/531,447 US4011577A (en) 1972-03-21 1974-12-10 Mechanical-electrical force transducer with semiconductor-insulating layer-tin oxide composite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2878872A JPS5317031B2 (cs) 1972-03-21 1972-03-21

Publications (2)

Publication Number Publication Date
JPS4896088A JPS4896088A (cs) 1973-12-08
JPS5317031B2 true JPS5317031B2 (cs) 1978-06-05

Family

ID=12258155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2878872A Expired JPS5317031B2 (cs) 1972-03-21 1972-03-21

Country Status (6)

Country Link
JP (1) JPS5317031B2 (cs)
CA (1) CA959975A (cs)
DE (1) DE2313604C3 (cs)
FR (1) FR2180687B1 (cs)
GB (1) GB1418519A (cs)
IT (1) IT981527B (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220111299A (ko) * 2019-12-05 2022-08-09 아톰 에이치투오, 엘엘씨 단일벽 탄소 나노튜브 막과 그 제조 방법 및 제조 장치

Also Published As

Publication number Publication date
GB1418519A (en) 1975-12-24
FR2180687B1 (cs) 1977-07-29
DE2313604A1 (de) 1973-12-06
CA959975A (en) 1974-12-24
DE2313604B2 (cs) 1979-01-04
IT981527B (it) 1974-10-10
DE2313604C3 (de) 1979-09-06
JPS4896088A (cs) 1973-12-08
FR2180687A1 (cs) 1973-11-30

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