JPS53165845U - - Google Patents

Info

Publication number
JPS53165845U
JPS53165845U JP7118377U JP7118377U JPS53165845U JP S53165845 U JPS53165845 U JP S53165845U JP 7118377 U JP7118377 U JP 7118377U JP 7118377 U JP7118377 U JP 7118377U JP S53165845 U JPS53165845 U JP S53165845U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7118377U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7118377U priority Critical patent/JPS53165845U/ja
Publication of JPS53165845U publication Critical patent/JPS53165845U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP7118377U 1977-05-31 1977-05-31 Pending JPS53165845U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7118377U JPS53165845U (enrdf_load_stackoverflow) 1977-05-31 1977-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7118377U JPS53165845U (enrdf_load_stackoverflow) 1977-05-31 1977-05-31

Publications (1)

Publication Number Publication Date
JPS53165845U true JPS53165845U (enrdf_load_stackoverflow) 1978-12-26

Family

ID=28981689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7118377U Pending JPS53165845U (enrdf_load_stackoverflow) 1977-05-31 1977-05-31

Country Status (1)

Country Link
JP (1) JPS53165845U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148003U (ja) * 1984-08-29 1986-03-31 璋 伊東 有機溶剤回収装置
JP2001321601A (ja) * 2000-05-12 2001-11-20 Sony Corp 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148003U (ja) * 1984-08-29 1986-03-31 璋 伊東 有機溶剤回収装置
JP2001321601A (ja) * 2000-05-12 2001-11-20 Sony Corp 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置

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