JPS53165845U - - Google Patents
Info
- Publication number
- JPS53165845U JPS53165845U JP7118377U JP7118377U JPS53165845U JP S53165845 U JPS53165845 U JP S53165845U JP 7118377 U JP7118377 U JP 7118377U JP 7118377 U JP7118377 U JP 7118377U JP S53165845 U JPS53165845 U JP S53165845U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7118377U JPS53165845U (cs) | 1977-05-31 | 1977-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7118377U JPS53165845U (cs) | 1977-05-31 | 1977-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53165845U true JPS53165845U (cs) | 1978-12-26 |
Family
ID=28981689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7118377U Pending JPS53165845U (cs) | 1977-05-31 | 1977-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53165845U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6148003U (ja) * | 1984-08-29 | 1986-03-31 | 璋 伊東 | 有機溶剤回収装置 |
| JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |
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1977
- 1977-05-31 JP JP7118377U patent/JPS53165845U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6148003U (ja) * | 1984-08-29 | 1986-03-31 | 璋 伊東 | 有機溶剤回収装置 |
| JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |