JPS5315207B2 - - Google Patents
Info
- Publication number
- JPS5315207B2 JPS5315207B2 JP8637673A JP8637673A JPS5315207B2 JP S5315207 B2 JPS5315207 B2 JP S5315207B2 JP 8637673 A JP8637673 A JP 8637673A JP 8637673 A JP8637673 A JP 8637673A JP S5315207 B2 JPS5315207 B2 JP S5315207B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electromagnetic Pumps, Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637673A JPS5315207B2 (Sortimente) | 1973-08-02 | 1973-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637673A JPS5315207B2 (Sortimente) | 1973-08-02 | 1973-08-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50106208A JPS50106208A (Sortimente) | 1975-08-21 |
| JPS5315207B2 true JPS5315207B2 (Sortimente) | 1978-05-23 |
Family
ID=13885149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8637673A Expired JPS5315207B2 (Sortimente) | 1973-08-02 | 1973-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315207B2 (Sortimente) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62261569A (ja) * | 1986-05-09 | 1987-11-13 | 九州日本電気株式会社 | 半導体基板収納箱搬送装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4725202U (Sortimente) * | 1971-04-05 | 1972-11-21 | ||
| JPS5141202U (Sortimente) * | 1974-09-19 | 1976-03-27 |
-
1973
- 1973-08-02 JP JP8637673A patent/JPS5315207B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62261569A (ja) * | 1986-05-09 | 1987-11-13 | 九州日本電気株式会社 | 半導体基板収納箱搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50106208A (Sortimente) | 1975-08-21 |