JPS53149388A - Ph measuring method of chemical copper plating solution - Google Patents

Ph measuring method of chemical copper plating solution

Info

Publication number
JPS53149388A
JPS53149388A JP6333977A JP6333977A JPS53149388A JP S53149388 A JPS53149388 A JP S53149388A JP 6333977 A JP6333977 A JP 6333977A JP 6333977 A JP6333977 A JP 6333977A JP S53149388 A JPS53149388 A JP S53149388A
Authority
JP
Japan
Prior art keywords
copper plating
plating solution
chemical copper
measuring method
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6333977A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0115819B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hitoshi Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6333977A priority Critical patent/JPS53149388A/ja
Publication of JPS53149388A publication Critical patent/JPS53149388A/ja
Publication of JPH0115819B2 publication Critical patent/JPH0115819B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
JP6333977A 1977-06-01 1977-06-01 Ph measuring method of chemical copper plating solution Granted JPS53149388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6333977A JPS53149388A (en) 1977-06-01 1977-06-01 Ph measuring method of chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6333977A JPS53149388A (en) 1977-06-01 1977-06-01 Ph measuring method of chemical copper plating solution

Publications (2)

Publication Number Publication Date
JPS53149388A true JPS53149388A (en) 1978-12-26
JPH0115819B2 JPH0115819B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-20

Family

ID=13226371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6333977A Granted JPS53149388A (en) 1977-06-01 1977-06-01 Ph measuring method of chemical copper plating solution

Country Status (1)

Country Link
JP (1) JPS53149388A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0440662U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-07-31 1992-04-07

Also Published As

Publication number Publication date
JPH0115819B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-20

Similar Documents

Publication Publication Date Title
IE42572L (en) Process for enzymatic analysis
JPS53149388A (en) Ph measuring method of chemical copper plating solution
JPS547397A (en) Ion concentration measuring apparatus
JPS55156865A (en) Organism component measuring compound and its manufacture plus organism component measuring composition, organism component measuring method and organism component measuring kit
JPS53149389A (en) Measurement method of copper ions and chelating agent concentration in chemical copper plating solution
JPS5436996A (en) Calcium analytical method
JPS5339193A (en) Measuring method for ion concentration of phosphoric acid and arsenic acid
JPS53122482A (en) Gas analyzer
JPS5323693A (en) Amalysing method for lead
JPS52132682A (en) Detection method of insulating film
JPS5350892A (en) Dissolved oxygen measuring meter
JPS5322499A (en) Analysing method and appa ratus for organic acid
JPS53123996A (en) Electrode for measuring perchloric acid ion activity
JPS5222479A (en) Method of inspecting masks
JPS538188A (en) On-line measuring method for concentration of concentrated waste liquid
JPS5443796A (en) Enzyme electrode
JPS53140094A (en) Corruption measuring system
JPS5214489A (en) Method and equipment of sensitivity calibration of the total oxygen requirement analyzer
JPS542180A (en) Measuring apparatus of low concentration gas radiactivity
JPS57157157A (en) Measuring method for ratio of water to cement
JPS545493A (en) Measuring apparatus of total carbon quantity in liquid specimen
JPS52137395A (en) Measuring method for cod of water containing chlorine ion
JPS5565152A (en) Measuring method for ion concentration
JPS5425775A (en) Easy measuring method of dielectric characteristics
JPS53109691A (en) Flow cell type analysis method and apparatus liquid for specimen