JPS5314930B2 - - Google Patents

Info

Publication number
JPS5314930B2
JPS5314930B2 JP1111075A JP1111075A JPS5314930B2 JP S5314930 B2 JPS5314930 B2 JP S5314930B2 JP 1111075 A JP1111075 A JP 1111075A JP 1111075 A JP1111075 A JP 1111075A JP S5314930 B2 JPS5314930 B2 JP S5314930B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1111075A
Other languages
Japanese (ja)
Other versions
JPS5185723A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1111075A priority Critical patent/JPS5314930B2/ja
Priority to NL7600797A priority patent/NL7600797A/xx
Priority to DE19762602934 priority patent/DE2602934A1/de
Publication of JPS5185723A publication Critical patent/JPS5185723A/ja
Priority to US05/814,943 priority patent/US4207105A/en
Publication of JPS5314930B2 publication Critical patent/JPS5314930B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
    • G03C5/40—Chemically transforming developed images
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP1111075A 1975-01-27 1975-01-27 Expired JPS5314930B2 (enrdf_load_stackoverflow)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1111075A JPS5314930B2 (enrdf_load_stackoverflow) 1975-01-27 1975-01-27
NL7600797A NL7600797A (nl) 1975-01-27 1976-01-27 Beeldvormingswerkwijze.
DE19762602934 DE2602934A1 (de) 1975-01-27 1976-01-27 Verfahren zur bilderzeugung
US05/814,943 US4207105A (en) 1975-01-27 1977-07-12 Plasma-etching image in exposed AgX emulsion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1111075A JPS5314930B2 (enrdf_load_stackoverflow) 1975-01-27 1975-01-27

Publications (2)

Publication Number Publication Date
JPS5185723A JPS5185723A (enrdf_load_stackoverflow) 1976-07-27
JPS5314930B2 true JPS5314930B2 (enrdf_load_stackoverflow) 1978-05-20

Family

ID=11768858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1111075A Expired JPS5314930B2 (enrdf_load_stackoverflow) 1975-01-27 1975-01-27

Country Status (3)

Country Link
JP (1) JPS5314930B2 (enrdf_load_stackoverflow)
DE (1) DE2602934A1 (enrdf_load_stackoverflow)
NL (1) NL7600797A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654440A (en) * 1979-10-11 1981-05-14 Dainippon Printing Co Ltd Photosensitive lithographic material and plate making method

Also Published As

Publication number Publication date
JPS5185723A (enrdf_load_stackoverflow) 1976-07-27
DE2602934A1 (de) 1976-07-29
NL7600797A (nl) 1976-07-29

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