JPS53148452A - Method of making holder for photo mask - Google Patents

Method of making holder for photo mask

Info

Publication number
JPS53148452A
JPS53148452A JP6284077A JP6284077A JPS53148452A JP S53148452 A JPS53148452 A JP S53148452A JP 6284077 A JP6284077 A JP 6284077A JP 6284077 A JP6284077 A JP 6284077A JP S53148452 A JPS53148452 A JP S53148452A
Authority
JP
Japan
Prior art keywords
photo mask
making holder
holder
making
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6284077A
Other languages
Japanese (ja)
Inventor
Masaomi Kameyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP6284077A priority Critical patent/JPS53148452A/en
Publication of JPS53148452A publication Critical patent/JPS53148452A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6284077A 1977-05-31 1977-05-31 Method of making holder for photo mask Pending JPS53148452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6284077A JPS53148452A (en) 1977-05-31 1977-05-31 Method of making holder for photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6284077A JPS53148452A (en) 1977-05-31 1977-05-31 Method of making holder for photo mask

Publications (1)

Publication Number Publication Date
JPS53148452A true JPS53148452A (en) 1978-12-25

Family

ID=13211896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6284077A Pending JPS53148452A (en) 1977-05-31 1977-05-31 Method of making holder for photo mask

Country Status (1)

Country Link
JP (1) JPS53148452A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007305944A (en) * 2006-05-15 2007-11-22 Univ Waseda Transfer device and transfer method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007305944A (en) * 2006-05-15 2007-11-22 Univ Waseda Transfer device and transfer method

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