JPS53147631A - Method of reducing activated gas - Google Patents

Method of reducing activated gas

Info

Publication number
JPS53147631A
JPS53147631A JP6298977A JP6298977A JPS53147631A JP S53147631 A JPS53147631 A JP S53147631A JP 6298977 A JP6298977 A JP 6298977A JP 6298977 A JP6298977 A JP 6298977A JP S53147631 A JPS53147631 A JP S53147631A
Authority
JP
Japan
Prior art keywords
activated gas
reducing activated
reducing
induction
activation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6298977A
Other languages
Japanese (ja)
Other versions
JPS586531B2 (en
Inventor
Masahiko Hirose
Masaaki Yada
Hitoshi Imamura
Shigeru Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP52062989A priority Critical patent/JPS586531B2/en
Publication of JPS53147631A publication Critical patent/JPS53147631A/en
Publication of JPS586531B2 publication Critical patent/JPS586531B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Hydrogen, Water And Hydrids (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE: To accomplish reduction and removal of metal oxides effectively at a low temperature through activation by discharge with addition of hydrogen gas and nitrogen gas prior to induction to a reaction chamber.
COPYRIGHT: (C)1978,JPO&Japio
JP52062989A 1977-05-30 1977-05-30 Activated gas reduction method Expired JPS586531B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52062989A JPS586531B2 (en) 1977-05-30 1977-05-30 Activated gas reduction method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52062989A JPS586531B2 (en) 1977-05-30 1977-05-30 Activated gas reduction method

Publications (2)

Publication Number Publication Date
JPS53147631A true JPS53147631A (en) 1978-12-22
JPS586531B2 JPS586531B2 (en) 1983-02-04

Family

ID=13216274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52062989A Expired JPS586531B2 (en) 1977-05-30 1977-05-30 Activated gas reduction method

Country Status (1)

Country Link
JP (1) JPS586531B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201812A (en) * 1994-01-11 1995-08-04 Tadahiro Omi Solid surface treatment apparatus, method, passive state film forming apparatus, method & process

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5256077A (en) * 1975-11-04 1977-05-09 Toshiba Corp Process of oxidation at low temperature

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5256077A (en) * 1975-11-04 1977-05-09 Toshiba Corp Process of oxidation at low temperature

Also Published As

Publication number Publication date
JPS586531B2 (en) 1983-02-04

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