JPS53146717A - Process for prevention aginst devitrification of highhsilica glass - Google Patents
Process for prevention aginst devitrification of highhsilica glassInfo
- Publication number
- JPS53146717A JPS53146717A JP6240877A JP6240877A JPS53146717A JP S53146717 A JPS53146717 A JP S53146717A JP 6240877 A JP6240877 A JP 6240877A JP 6240877 A JP6240877 A JP 6240877A JP S53146717 A JPS53146717 A JP S53146717A
- Authority
- JP
- Japan
- Prior art keywords
- highhsilica
- aginst
- devitrification
- prevention
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6240877A JPS53146717A (en) | 1977-05-27 | 1977-05-27 | Process for prevention aginst devitrification of highhsilica glass |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6240877A JPS53146717A (en) | 1977-05-27 | 1977-05-27 | Process for prevention aginst devitrification of highhsilica glass |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53146717A true JPS53146717A (en) | 1978-12-20 |
Family
ID=13199276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6240877A Pending JPS53146717A (en) | 1977-05-27 | 1977-05-27 | Process for prevention aginst devitrification of highhsilica glass |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53146717A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06224137A (en) * | 1992-06-05 | 1994-08-12 | Applied Materials Inc | Integrated circuit structure processor having chemical corrosion resistant aluminum oxide protective film on surface of its quartz window which is in contact with corrosive chemical substance |
US6027792A (en) * | 1995-10-03 | 2000-02-22 | Kabushiki Kaisha Kobe Seiko Sho | Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same |
US6077718A (en) * | 1985-07-23 | 2000-06-20 | Canon Kabushiki Kaisha | Method for forming deposited film |
WO2000074123A1 (en) * | 1999-05-31 | 2000-12-07 | Tokyo Electron Limited | Transparent window of process chamber of process apparatus, and method of manufacture thereof |
-
1977
- 1977-05-27 JP JP6240877A patent/JPS53146717A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6077718A (en) * | 1985-07-23 | 2000-06-20 | Canon Kabushiki Kaisha | Method for forming deposited film |
JPH06224137A (en) * | 1992-06-05 | 1994-08-12 | Applied Materials Inc | Integrated circuit structure processor having chemical corrosion resistant aluminum oxide protective film on surface of its quartz window which is in contact with corrosive chemical substance |
US6027792A (en) * | 1995-10-03 | 2000-02-22 | Kabushiki Kaisha Kobe Seiko Sho | Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same |
WO2000074123A1 (en) * | 1999-05-31 | 2000-12-07 | Tokyo Electron Limited | Transparent window of process chamber of process apparatus, and method of manufacture thereof |
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