JPS53146717A - Process for prevention aginst devitrification of highhsilica glass - Google Patents

Process for prevention aginst devitrification of highhsilica glass

Info

Publication number
JPS53146717A
JPS53146717A JP6240877A JP6240877A JPS53146717A JP S53146717 A JPS53146717 A JP S53146717A JP 6240877 A JP6240877 A JP 6240877A JP 6240877 A JP6240877 A JP 6240877A JP S53146717 A JPS53146717 A JP S53146717A
Authority
JP
Japan
Prior art keywords
highhsilica
aginst
devitrification
prevention
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6240877A
Other languages
Japanese (ja)
Inventor
Masaya Aoyanagi
Takeshi Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP6240877A priority Critical patent/JPS53146717A/en
Publication of JPS53146717A publication Critical patent/JPS53146717A/en
Pending legal-status Critical Current

Links

JP6240877A 1977-05-27 1977-05-27 Process for prevention aginst devitrification of highhsilica glass Pending JPS53146717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6240877A JPS53146717A (en) 1977-05-27 1977-05-27 Process for prevention aginst devitrification of highhsilica glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6240877A JPS53146717A (en) 1977-05-27 1977-05-27 Process for prevention aginst devitrification of highhsilica glass

Publications (1)

Publication Number Publication Date
JPS53146717A true JPS53146717A (en) 1978-12-20

Family

ID=13199276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6240877A Pending JPS53146717A (en) 1977-05-27 1977-05-27 Process for prevention aginst devitrification of highhsilica glass

Country Status (1)

Country Link
JP (1) JPS53146717A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06224137A (en) * 1992-06-05 1994-08-12 Applied Materials Inc Integrated circuit structure processor having chemical corrosion resistant aluminum oxide protective film on surface of its quartz window which is in contact with corrosive chemical substance
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
US6077718A (en) * 1985-07-23 2000-06-20 Canon Kabushiki Kaisha Method for forming deposited film
WO2000074123A1 (en) * 1999-05-31 2000-12-07 Tokyo Electron Limited Transparent window of process chamber of process apparatus, and method of manufacture thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6077718A (en) * 1985-07-23 2000-06-20 Canon Kabushiki Kaisha Method for forming deposited film
JPH06224137A (en) * 1992-06-05 1994-08-12 Applied Materials Inc Integrated circuit structure processor having chemical corrosion resistant aluminum oxide protective film on surface of its quartz window which is in contact with corrosive chemical substance
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
WO2000074123A1 (en) * 1999-05-31 2000-12-07 Tokyo Electron Limited Transparent window of process chamber of process apparatus, and method of manufacture thereof

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