JPS5314462B2 - - Google Patents
Info
- Publication number
- JPS5314462B2 JPS5314462B2 JP2527374A JP2527374A JPS5314462B2 JP S5314462 B2 JPS5314462 B2 JP S5314462B2 JP 2527374 A JP2527374 A JP 2527374A JP 2527374 A JP2527374 A JP 2527374A JP S5314462 B2 JPS5314462 B2 JP S5314462B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Tunnel Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527374A JPS5314462B2 (en:Method) | 1974-03-06 | 1974-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527374A JPS5314462B2 (en:Method) | 1974-03-06 | 1974-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50120567A JPS50120567A (en:Method) | 1975-09-20 |
| JPS5314462B2 true JPS5314462B2 (en:Method) | 1978-05-17 |
Family
ID=12161411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2527374A Expired JPS5314462B2 (en:Method) | 1974-03-06 | 1974-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5314462B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5718764Y2 (en:Method) * | 1975-10-15 | 1982-04-20 | ||
| JPH064587Y2 (ja) * | 1987-01-29 | 1994-02-02 | 日電アネルバ株式会社 | 縦型バイアススパツタリング装置の基板ホルダ− |
-
1974
- 1974-03-06 JP JP2527374A patent/JPS5314462B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50120567A (en:Method) | 1975-09-20 |