JPS5314462B2 - - Google Patents

Info

Publication number
JPS5314462B2
JPS5314462B2 JP2527374A JP2527374A JPS5314462B2 JP S5314462 B2 JPS5314462 B2 JP S5314462B2 JP 2527374 A JP2527374 A JP 2527374A JP 2527374 A JP2527374 A JP 2527374A JP S5314462 B2 JPS5314462 B2 JP S5314462B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2527374A
Other languages
Japanese (ja)
Other versions
JPS50120567A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2527374A priority Critical patent/JPS5314462B2/ja
Publication of JPS50120567A publication Critical patent/JPS50120567A/ja
Publication of JPS5314462B2 publication Critical patent/JPS5314462B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2527374A 1974-03-06 1974-03-06 Expired JPS5314462B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2527374A JPS5314462B2 (enrdf_load_stackoverflow) 1974-03-06 1974-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2527374A JPS5314462B2 (enrdf_load_stackoverflow) 1974-03-06 1974-03-06

Publications (2)

Publication Number Publication Date
JPS50120567A JPS50120567A (enrdf_load_stackoverflow) 1975-09-20
JPS5314462B2 true JPS5314462B2 (enrdf_load_stackoverflow) 1978-05-17

Family

ID=12161411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2527374A Expired JPS5314462B2 (enrdf_load_stackoverflow) 1974-03-06 1974-03-06

Country Status (1)

Country Link
JP (1) JPS5314462B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5718764Y2 (enrdf_load_stackoverflow) * 1975-10-15 1982-04-20
JPH064587Y2 (ja) * 1987-01-29 1994-02-02 日電アネルバ株式会社 縦型バイアススパツタリング装置の基板ホルダ−

Also Published As

Publication number Publication date
JPS50120567A (enrdf_load_stackoverflow) 1975-09-20

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