JPS53144544U - - Google Patents
Info
- Publication number
- JPS53144544U JPS53144544U JP4951577U JP4951577U JPS53144544U JP S53144544 U JPS53144544 U JP S53144544U JP 4951577 U JP4951577 U JP 4951577U JP 4951577 U JP4951577 U JP 4951577U JP S53144544 U JPS53144544 U JP S53144544U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fixing For Electrophotography (AREA)
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977049515U JPS5833665Y2 (ja) | 1977-04-21 | 1977-04-21 | 面ヒ−タ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977049515U JPS5833665Y2 (ja) | 1977-04-21 | 1977-04-21 | 面ヒ−タ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53144544U true JPS53144544U (zh) | 1978-11-14 |
JPS5833665Y2 JPS5833665Y2 (ja) | 1983-07-27 |
Family
ID=28935248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977049515U Expired JPS5833665Y2 (ja) | 1977-04-21 | 1977-04-21 | 面ヒ−タ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5833665Y2 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011023685A (ja) * | 2009-07-21 | 2011-02-03 | Hitachi Kokusai Electric Inc | 加熱装置、基板処理装置、及び半導体装置の製造方法 |
JP2014212045A (ja) * | 2013-04-19 | 2014-11-13 | 株式会社クリエイティブ テクノロジー | 面状発熱体 |
JP2016171066A (ja) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | ヒータおよびこれを用いた半導体製造装置 |
JP2019102135A (ja) * | 2017-11-28 | 2019-06-24 | 京セラ株式会社 | ヒータ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001342071A (ja) * | 2000-05-26 | 2001-12-11 | Shin Etsu Chem Co Ltd | セラミックスヒータ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949439U (zh) * | 1972-08-05 | 1974-04-30 |
-
1977
- 1977-04-21 JP JP1977049515U patent/JPS5833665Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949439U (zh) * | 1972-08-05 | 1974-04-30 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011023685A (ja) * | 2009-07-21 | 2011-02-03 | Hitachi Kokusai Electric Inc | 加熱装置、基板処理装置、及び半導体装置の製造方法 |
JP2014212045A (ja) * | 2013-04-19 | 2014-11-13 | 株式会社クリエイティブ テクノロジー | 面状発熱体 |
JP2016171066A (ja) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | ヒータおよびこれを用いた半導体製造装置 |
CN110034048A (zh) * | 2015-03-09 | 2019-07-19 | 纽富来科技股份有限公司 | 加热器以及使用了其的半导体装置的制造装置 |
CN110034048B (zh) * | 2015-03-09 | 2023-05-26 | 纽富来科技股份有限公司 | 加热器以及使用了其的半导体装置的制造装置 |
JP2019102135A (ja) * | 2017-11-28 | 2019-06-24 | 京セラ株式会社 | ヒータ |
Also Published As
Publication number | Publication date |
---|---|
JPS5833665Y2 (ja) | 1983-07-27 |