JPS5314428Y2 - - Google Patents

Info

Publication number
JPS5314428Y2
JPS5314428Y2 JP14139873U JP14139873U JPS5314428Y2 JP S5314428 Y2 JPS5314428 Y2 JP S5314428Y2 JP 14139873 U JP14139873 U JP 14139873U JP 14139873 U JP14139873 U JP 14139873U JP S5314428 Y2 JPS5314428 Y2 JP S5314428Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14139873U
Other versions
JPS5084834U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14139873U priority Critical patent/JPS5314428Y2/ja
Publication of JPS5084834U publication Critical patent/JPS5084834U/ja
Application granted granted Critical
Publication of JPS5314428Y2 publication Critical patent/JPS5314428Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)
JP14139873U 1973-12-06 1973-12-06 Expired JPS5314428Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14139873U JPS5314428Y2 (ja) 1973-12-06 1973-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14139873U JPS5314428Y2 (ja) 1973-12-06 1973-12-06

Publications (2)

Publication Number Publication Date
JPS5084834U JPS5084834U (ja) 1975-07-19
JPS5314428Y2 true JPS5314428Y2 (ja) 1978-04-17

Family

ID=28420761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14139873U Expired JPS5314428Y2 (ja) 1973-12-06 1973-12-06

Country Status (1)

Country Link
JP (1) JPS5314428Y2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791261A (en) * 1987-09-23 1988-12-13 International Business Machines Corporation Crucible for evaporation of metallic film

Also Published As

Publication number Publication date
JPS5084834U (ja) 1975-07-19

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